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Title: Liquid metal ion source and alloy

A liquid metal ion source and alloy, wherein the species to be emitted from the ion source is contained in a congruently vaporizing alloy. In one embodiment, the liquid metal ion source acts as a source of arsenic, and in a source alloy the arsenic is combined with palladium, preferably in a liquid alloy having a range of compositions from about 24 to about 33 atomic percent arsenic. Such an alloy may be readily prepared by a combustion synthesis technique. Liquid metal ion sources thus prepared produce arsenic ions for implantation, have long lifetimes, and are highly stable in operation.
Authors:
 [1] ;  [2] ;  [3] ;  [3] ;  [3] ;  [4] ;  [5]
  1. (Thousand Oaks, CA)
  2. (Saugus, CA)
  3. (Los Alamos, NM)
  4. (Santa Fe, NM)
  5. (McMinnville, OR)
Publication Date:
OSTI Identifier:
866732
Report Number(s):
US 4775818
US patent application 06/851,757
DOE Contract Number:
83 F842300
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
liquid; metal; source; alloy; liquid; metal; source; alloy; species; emitted; source; contained; congruently; vaporizing; alloy; embodiment; liquid; metal; source; source; arsenic; source; alloy; arsenic; combined; palladium; preferably; liquid; alloy; range; compositions; 24; 33; atomic; percent; arsenic; alloy; readily; prepared; combustion; synthesis; technique; liquid; metal; sources; prepared; produce; arsenic; implantation; lifetimes; highly; stable; operation; combustion synthesis; atomic percent; liquid metal; liquid metal; liquid metal; liquid metal; readily prepared; highly stable /313/