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Title: Liquid metal ion source and alloy for ion emission of multiple ionic species

A liquid metal ion source and alloy for the simultaneous ion evaporation of arsenic and boron, arsenic and phosphorus, or arsenic, boron and phosphorus. The ionic species to be evaporated are contained in palladium-arsenic-boron and palladium-arsenic-boron-phosphorus alloys. The ion source, including an emitter means such as a needle emitter and a source means such as U-shaped heater element, is preferably constructed of rhenium and tungsten, both of which are readily fabricated. The ion sources emit continuous beams of ions having sufficiently high currents of the desired species to be useful in ion implantation of semiconductor wafers for preparing integrated circuit devices. The sources are stable in operation, experience little corrosion during operation, and have long operating lifetimes.
Authors:
 [1] ;  [2] ;  [3] ;  [4] ;  [4] ;  [4] ;  [5] ;  [5]
  1. (Thousand Oaks, CA)
  2. (Saugus, CA)
  3. (Oxnard, CA)
  4. (Los Alamos, NM)
  5. (McMinnville, OR)
Publication Date:
OSTI Identifier:
866272
Report Number(s):
US 4670685
US patent application 06/851,755
DOE Contract Number:
83F842300
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
liquid; metal; source; alloy; emission; multiple; ionic; species; liquid; metal; source; alloy; simultaneous; evaporation; arsenic; boron; arsenic; phosphorus; arsenic; boron; phosphorus; ionic; species; evaporated; contained; palladium-arsenic-boron; palladium-arsenic-boron-phosphorus; alloys; source; including; emitter; means; needle; emitter; source; means; u-shaped; heater; element; preferably; constructed; rhenium; tungsten; readily; fabricated; sources; emit; continuous; beams; sufficiently; currents; desired; species; useful; implantation; semiconductor; wafers; preparing; integrated; circuit; devices; sources; stable; operation; experience; corrosion; operation; operating; lifetimes; semiconductor wafers; preferably constructed; operating life; source means; semiconductor wafer; liquid metal; liquid metal; integrated circuit; circuit device; operating lifetime; operating lifetimes; ionic species; ionic species; circuit devices; heater element /313/250/