A Parallel Detecting Spectroscopic Ellipsometer for In-Situ Real Time Process Control of TPV Manfacuturing
(oak - 259) To provide deposited thin film property characterization, ITN has developed a patented parallel detecting, spectroscopic ellipsometer (PDSE) sensor that measures, in-situ, the change in polarization state of light reflected from the PV/TPV material inside the vacuum chamber in as little as 3 ms. For this project, It will apply this unique and enabling technology to state -of-the-art PV/TPV manufacturing and develop the corresponding PDSE interpretive algorithms, models, and process controls needed to enhance product yield and decrease manufacturing cost. The ultimate goal for this project is to develop, implement, and commercialize the necessary sensor and control components needed to provide the state-of-the-art process control required for world class PV/TPV manufacturing. In the Phase I project, ITN adapted the PDSE to measure near IR spectra and demonstrated the capability of the PDSE to perform in-situ, real-time measurements on PV/TPV materials deposited on a moving flexible substrate in the harsh conditions associated with vacuum deposition systems that contain molecular species. ITN also demonstrated the feasibility of relatively simple interpretive algorithms to convert the PDSE data to film property information that can be used for process control and demonstrated feasibility of a control strategy that incorporates measured data. We also developed process models and a multilayer dynamic model-based process control strategies that will be performed during a Phase II effort.
- Research Organization:
- Oakland Operations Office, Oakland, CA
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- DE-FG03-00ER83030
- OSTI ID:
- 793925
- Country of Publication:
- United States
- Language:
- English
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