skip to main content

SciTech ConnectSciTech Connect

Title: ION BEAM SYNTHESIS OF BURIED OXIDE LAYERS IN SILICON CARBIDE

No abstract prepared.
Authors:
; ;
Publication Date:
OSTI Identifier:
786218
Report Number(s):
LA-UR-99-6109
TRN: US200306%%38
DOE Contract Number:
W-7405-ENG-36
Resource Type:
Conference
Resource Relation:
Conference: Conference title not supplied, Conference location not supplied, Conference dates not supplied; Other Information: PBD: 1 Nov 1999
Research Org:
Los Alamos National Lab., NM (US)
Sponsoring Org:
US Department of Energy (US)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ION BEAMS; OXIDES; SILICON CARBIDES; ENERGY BEAM DEPOSITION