Resonance response of scanning force microscopy cantilevers

Journal Article · Mon Aug 01 00:00:00 EDT 1994 · Review of Scientific Instruments; (United States)

DOI:https://doi.org/10.1063/1.1144647· OSTI ID:7266215

Chen, G Y; Warmack, R J; Thundat, T; Allison, D P ^[1]; Huang, A ^[2]

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1. Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831 (United States)
2. Physics Department, University of Tennessee, Knoxville, Tennessee 37996 (United States)

A variational method is used to calculate the deflection and the fundamental and harmonic resonance frequencies of commercial V-shaped and rectangular atomic force microscopy cantilevers. The effective mass of V-shaped cantilevers is roughly half that calculated for the equivalent rectangular cantilevers. Damping by environmental gases, including air, nitrogen, argon, and helium, affects the frequency of maximum response and to a much greater degree the quality factor [ital Q]. Helium has the lowest viscosity, resulting in the highest [ital Q], and thus provides the best sensitivity in noncontact force microscopy. Damping in liquids is dominated by an increase in effective mass of the cantilever due to an added mass of the liquid being dragged with that cantilever.

• DOE Contract Number: AC05-84OR21400
• OSTI ID: 7266215
• Journal Information: Review of Scientific Instruments; (United States), Vol. 65:8; ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

47 OTHER INSTRUMENTATION
MICROSCOPES
SENSITIVITY
DAMPING
RESONANCE
SURFACES
VARIATIONAL METHODS
CALCULATION METHODS
440800* - Miscellaneous Instrumentation- (1990-)