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Title: Angular distribution of particles sputtered from metals and alloys

Abstract

The angular distributions of atoms sputtered from pure Cu and Be as well as Cu/sub 98/Be/sub 2/, Cu/sub 71/Zn/sub 29/, Co/sub 3/Au, and WSi/sub 2.3/ were investigated for bombardment with Ar/sup +/ ions of 250 eV and 2 keV under normal incidence. Between polar emission angles theta = 0/sup 0/ and 60/sup 0/, for the higher bombarding energy all observed angular distributions look very much alike and follow essentially a cos/sup 3/ theta law. For the low bombarding energy, however, significant differences between the angular distributions of the alloy constituents are found. The effect, which is most pronounced for CuBe, seems to scale with the atomic mass in the way that the lower mass particles are sputtered preferentially along the surface normal.

Authors:
;
Publication Date:
Research Org.:
IBM T. J. Watson Research Center, Yorktown Heights, New York 10598
OSTI Identifier:
7231872
Resource Type:
Journal Article
Journal Name:
J. Vac. Sci. Technol., A; (United States)
Additional Journal Information:
Journal Volume: 6:4
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ARGON IONS; COLLISIONS; BERYLLIUM; ION COLLISIONS; SPUTTERING; BERYLLIUM ALLOYS; COBALT BASE ALLOYS; COPPER; COPPER BASE ALLOYS; GOLD ALLOYS; SILICON ALLOYS; TUNGSTEN ALLOYS; ZINC ALLOYS; ANGULAR DISTRIBUTION; EV RANGE 100-1000; KEV RANGE 01-10; ALKALINE EARTH METALS; ALLOYS; CHARGED PARTICLES; COBALT ALLOYS; COPPER ALLOYS; DISTRIBUTION; ELEMENTS; ENERGY RANGE; EV RANGE; IONS; KEV RANGE; METALS; TRANSITION ELEMENTS; 656003* - Condensed Matter Physics- Interactions between Beams & Condensed Matter- (1987-)

Citation Formats

Wucher, A, and Reuter, W. Angular distribution of particles sputtered from metals and alloys. United States: N. p., 1988. Web. doi:10.1116/1.575582.
Wucher, A, & Reuter, W. Angular distribution of particles sputtered from metals and alloys. United States. https://doi.org/10.1116/1.575582
Wucher, A, and Reuter, W. 1988. "Angular distribution of particles sputtered from metals and alloys". United States. https://doi.org/10.1116/1.575582.
@article{osti_7231872,
title = {Angular distribution of particles sputtered from metals and alloys},
author = {Wucher, A and Reuter, W},
abstractNote = {The angular distributions of atoms sputtered from pure Cu and Be as well as Cu/sub 98/Be/sub 2/, Cu/sub 71/Zn/sub 29/, Co/sub 3/Au, and WSi/sub 2.3/ were investigated for bombardment with Ar/sup +/ ions of 250 eV and 2 keV under normal incidence. Between polar emission angles theta = 0/sup 0/ and 60/sup 0/, for the higher bombarding energy all observed angular distributions look very much alike and follow essentially a cos/sup 3/ theta law. For the low bombarding energy, however, significant differences between the angular distributions of the alloy constituents are found. The effect, which is most pronounced for CuBe, seems to scale with the atomic mass in the way that the lower mass particles are sputtered preferentially along the surface normal.},
doi = {10.1116/1.575582},
url = {https://www.osti.gov/biblio/7231872}, journal = {J. Vac. Sci. Technol., A; (United States)},
number = ,
volume = 6:4,
place = {United States},
year = {Fri Jul 01 00:00:00 EDT 1988},
month = {Fri Jul 01 00:00:00 EDT 1988}
}