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Title: Solid-state lasers for x-ray lithography

Abstract

Background technical and cost information are compiled on four solid-state laser systems for x-ray lithography. If one takes a single work station on an IBM synchrotron beam-line as a standard, there is no near-term glass laser driven source to equal it. Our least cost near-term solid-state laser which can meet all the requirements is CVL pumped Ti:sapphire, but the high cost of CVL pumping makes its long-term salability questionable. The most attractive long-term option appears to be diode pumped Nd:YAG with Vortek arc-lamp pumped Nd:YAG as a low risk backup. Both of these solid-state options appear to significantly undercut synchrotron based x-ray sources in capital cost and probably also in operating costs as well as safety considerations. Once engineering development of solid-state x-ray lithographic laser systems is complete, one to a few kilowatt crystalline lasers should be producible for between $1 million and $2 million. 23 refs., 25 figs., 4 tabs.

Authors:
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
720356
Report Number(s):
UCID-21948
ON: TI90020703
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Technical Report
Resource Relation:
Other Information: PBD: Dec 1989
Country of Publication:
United States
Language:
English
Subject:
44; SOLID STATE LASERS; SEMICONDUCTOR MATERIALS; MASKING; COST; X-RAY EQUIPMENT; OPTICAL PUMPING; NEODYMIUM LASERS; SEMICONDUCTOR DEVICES; X-RAY SOURCES; ETCHING

Citation Formats

Manes, K R. Solid-state lasers for x-ray lithography. United States: N. p., 1989. Web.
Manes, K R. Solid-state lasers for x-ray lithography. United States.
Manes, K R. 1989. "Solid-state lasers for x-ray lithography". United States.
@article{osti_720356,
title = {Solid-state lasers for x-ray lithography},
author = {Manes, K R},
abstractNote = {Background technical and cost information are compiled on four solid-state laser systems for x-ray lithography. If one takes a single work station on an IBM synchrotron beam-line as a standard, there is no near-term glass laser driven source to equal it. Our least cost near-term solid-state laser which can meet all the requirements is CVL pumped Ti:sapphire, but the high cost of CVL pumping makes its long-term salability questionable. The most attractive long-term option appears to be diode pumped Nd:YAG with Vortek arc-lamp pumped Nd:YAG as a low risk backup. Both of these solid-state options appear to significantly undercut synchrotron based x-ray sources in capital cost and probably also in operating costs as well as safety considerations. Once engineering development of solid-state x-ray lithographic laser systems is complete, one to a few kilowatt crystalline lasers should be producible for between $1 million and $2 million. 23 refs., 25 figs., 4 tabs.},
doi = {},
url = {https://www.osti.gov/biblio/720356}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Fri Dec 01 00:00:00 EST 1989},
month = {Fri Dec 01 00:00:00 EST 1989}
}

Technical Report:
Other availability
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