Solid-state lasers for x-ray lithography
Abstract
Background technical and cost information are compiled on four solid-state laser systems for x-ray lithography. If one takes a single work station on an IBM synchrotron beam-line as a standard, there is no near-term glass laser driven source to equal it. Our least cost near-term solid-state laser which can meet all the requirements is CVL pumped Ti:sapphire, but the high cost of CVL pumping makes its long-term salability questionable. The most attractive long-term option appears to be diode pumped Nd:YAG with Vortek arc-lamp pumped Nd:YAG as a low risk backup. Both of these solid-state options appear to significantly undercut synchrotron based x-ray sources in capital cost and probably also in operating costs as well as safety considerations. Once engineering development of solid-state x-ray lithographic laser systems is complete, one to a few kilowatt crystalline lasers should be producible for between $1 million and $2 million. 23 refs., 25 figs., 4 tabs.
- Authors:
- Publication Date:
- Research Org.:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 720356
- Report Number(s):
- UCID-21948
ON: TI90020703
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Technical Report
- Resource Relation:
- Other Information: PBD: Dec 1989
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 44; SOLID STATE LASERS; SEMICONDUCTOR MATERIALS; MASKING; COST; X-RAY EQUIPMENT; OPTICAL PUMPING; NEODYMIUM LASERS; SEMICONDUCTOR DEVICES; X-RAY SOURCES; ETCHING
Citation Formats
Manes, K R. Solid-state lasers for x-ray lithography. United States: N. p., 1989.
Web.
Manes, K R. Solid-state lasers for x-ray lithography. United States.
Manes, K R. 1989.
"Solid-state lasers for x-ray lithography". United States.
@article{osti_720356,
title = {Solid-state lasers for x-ray lithography},
author = {Manes, K R},
abstractNote = {Background technical and cost information are compiled on four solid-state laser systems for x-ray lithography. If one takes a single work station on an IBM synchrotron beam-line as a standard, there is no near-term glass laser driven source to equal it. Our least cost near-term solid-state laser which can meet all the requirements is CVL pumped Ti:sapphire, but the high cost of CVL pumping makes its long-term salability questionable. The most attractive long-term option appears to be diode pumped Nd:YAG with Vortek arc-lamp pumped Nd:YAG as a low risk backup. Both of these solid-state options appear to significantly undercut synchrotron based x-ray sources in capital cost and probably also in operating costs as well as safety considerations. Once engineering development of solid-state x-ray lithographic laser systems is complete, one to a few kilowatt crystalline lasers should be producible for between $1 million and $2 million. 23 refs., 25 figs., 4 tabs.},
doi = {},
url = {https://www.osti.gov/biblio/720356},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Fri Dec 01 00:00:00 EST 1989},
month = {Fri Dec 01 00:00:00 EST 1989}
}