skip to main content

Title: Detector and energy analyzer for energetic-hydrogen in beams and plasmas

A detector for detecting energetic hydrogen ions and atoms ranging in energy from about 1 eV up to 1 keV in an evacuated environment includes a Schottky diode with a palladium or palladium-alloy gate metal applied to a silicon-dioxide layer on an n-silicon substrate. An array of the energetic-hydrogen detectors having a range of energy sensitivities form a plasma energy analyzer having a rapid response time and a sensitivity for measuring fluxes of energetic hydrogen. The detector is sensitive to hydrogen and its isotopes but is insensitive to non-hydrogenic particles. The array of energetic-hydrogen detectors can be formed on a single silicon chip, with thin-film layers of gold metal applied in various thicknesses to successive detectors in the array. The gold layers serve as particle energy-filters so that each detector is sensitive to a different range of hydrogen energies. 4 figs.
Authors:
; ;
Publication Date:
OSTI Identifier:
7068106
Report Number(s):
US 4782302; A
PPN: US 6-925590
DOE Contract Number:
AC04-76DP00789
Resource Type:
Patent
Resource Relation:
Patent File Date: 31 Oct 1986
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS; 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; BEAM ANALYZERS; HYDROGEN; DETECTION; HYDROGEN ISOTOPES; PLASMA DIAGNOSTICS; SCHOTTKY BARRIER DIODES; SENSITIVITY; VACUUM SYSTEMS; ELEMENTS; ISOTOPES; NONMETALS; SEMICONDUCTOR DEVICES; SEMICONDUCTOR DIODES 430300* -- Particle Accelerators-- Auxiliaries & Components; 700320 -- Plasma Diagnostic Techniques & Instrumentation-- (1992-)