Infrared studies of the surface and gas phase reactions leading to the growth of titanium nitride thin films from tetrakis (dimethylamido) titanium and ammonia
- AT and T Bell Labs., Murray Hill, NJ (United States)
- Illinois Univ., Urbana, IL (United States). Materials Research Lab.
In this paper, the reaction of tetrakis (dimethylamido) titanium (Ti(NME[sub 2])[sub 4]) with ammonia is studied in the gas phase and on titanium disilicide, aluminum, and copper surfaces using infrared spectroscopy. In the gas phase the main product of this reaction, dimethylamine, forms rapidly even at 300 K, and a fine yellow powder is deposited on the windows of the IR cell. Under ultrahigh vacuum conditions there is no reaction between Ti(NMe[sub 2])[sub 4] and NH[sub 3] on any of the three surfaces studied at temperatures between 300 and 650 K. Heating pure Ti(NMe[sub 2])[sub 4] to temperatures [gt] 550K in the gas phase, leads to species that contain Ti-N-C metallacycles and N=C double bonds. The thermal decomposition of Ti(NMe[sub 2])[sub 4] on both TiSi[sub 2] and Al surfaces at temperatures up to 650 K yields films that contain titanium, nitrogen, and a significant amount of carbon. No decomposition is observed on copper; instead, molecular desorption occurs below 400 K. The authors' observations are compared with the known thermal chemistry of titanium dialkylamides in solution.
- DOE Contract Number:
- FG02-91ER45439
- OSTI ID:
- 7034310
- Journal Information:
- Journal of the Electrochemical Society; (United States), Vol. 139:12; ISSN 0013-4651
- Country of Publication:
- United States
- Language:
- English
Similar Records
Atmospheric pressure chemical vapor deposition of TiN from tetrakis(dimethylamido)titanium and ammonia
Time-resolved surface infrared spectroscopy during atomic layer deposition of TiO{sub 2} using tetrakis(dimethylamido)titanium and water
Related Subjects
74 ATOMIC AND MOLECULAR PHYSICS
THIN FILMS
INFRARED SPECTRA
PRECURSOR
TITANIUM NITRIDES
AMIDES
AMMONIA
CHEMICAL REACTION KINETICS
PHASE STUDIES
TEMPERATURE RANGE 0400-1000 K
THERMODYNAMIC PROPERTIES
ULTRAHIGH VACUUM
FILMS
HYDRIDES
HYDROGEN COMPOUNDS
KINETICS
NITRIDES
NITROGEN COMPOUNDS
NITROGEN HYDRIDES
ORGANIC COMPOUNDS
ORGANIC NITROGEN COMPOUNDS
PHYSICAL PROPERTIES
PNICTIDES
REACTION KINETICS
SPECTRA
TEMPERATURE RANGE
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
360204* - Ceramics
Cermets
& Refractories- Physical Properties
664200 - Spectra of Atoms & Molecules & their Interactions with Photons- (1992-)
360202 - Ceramics
Cermets
& Refractories- Structure & Phase Studies