Influence of electrode geometry on liquid metal ion source performance

Journal Article · Fri Jul 01 00:00:00 EDT 1988 · J. Vac. Sci. Technol., B; (United States)

DOI:https://doi.org/10.1116/1.584298· OSTI ID:7023371

Swanson, L W; Li, J Z

The surface electric field distribution along the axis of a wetted needle type liquid metal ion source has been determined by numerical methods and is shown to exhibit a secondary maximum at the intersection of the cylindrical and conical sections. It is shown that the volume flow rate of the liquid metal film along the cylindrical portion of the emitter is adequate to resupply the ionized portion at the needle apex. However, a pressure minimum in the liquid film, which decreases with increasing apex cone angle, occurs at the cone/cylinder intersection and the pressure gradient formed on the conical section of the emitter opposes flow to the apex region. It is shown that, by chemically roughening the conical section of the emitter, liquid film flow via microcapillary action occurs in such a way as to provide a low flow impedance to the apex.

• Research Organization: Oregon Graduate Center, Beaverton, Oregon 97006-1999
• OSTI ID: 7023371
• Journal Information: J. Vac. Sci. Technol., B; (United States), Vol. 6:4
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
GALLIUM IONS
ION SOURCES
DESIGN
ELECTRODES
PERFORMANCE
BEAM PRODUCTION
ETCHING
FABRICATION
FLUID FLOW
GALLIUM
ION BEAMS
LIQUID METALS
OPERATION
BEAMS
CHARGED PARTICLES
ELEMENTS
FLUIDS
IONS
LIQUIDS
METALS
SURFACE FINISHING
640301* - Atomic
Molecular & Chemical Physics- Beams & their Reactions