Development and fabrication of a solar cell junction processing system. Quarterly progress report No. 3, October 1980
The basic objectives of the program are the following: (1) to design, develop, construct and deliver a junction processing system which will be capable of producing solar cell junctions by means of ion implantation followed by pulsed electron beam annealing; (2) to include in the system a wafer transport mechanism capable of transferring 4-inch-diameter wafers into and out of the vacuum chamber where the ion implantation and pulsed electron beam annealing processes take place; (3) to integrate, test and demonstrate the system prior to its delivery to JPL along with detailed operating and maintenance manuals; and (4) to estimate component lifetimes and costs, as necessary for the contract, for the performance of comprehensive analyses in accordance with the Solar Array Manufacturing Industry Costing Standards (SAMICS). Under this contract the automated junction formation equipment to be developed involves a new system design incorporating a modified, government-owned, JPL-controlled ion implanter into a spire-developed pulsed electron beam annealer and wafer transport system. When modified, the ion implanter will deliver a 16 mA beam of /sup 31/P/sup +/ ions with a fluence of 2.5 x 10/sup 15/ ions per square centimeter at an energy of 10 keV. The throughput design goal rate for the junction processor is 10/sup 7/ four-inch-diameter wafers per year. Work on the pulsed electron beam subsystem development is described. (WHK)
- Research Organization:
- Spire Corp., Bedford, MA (USA)
- DOE Contract Number:
- NAS-7-100-955640
- OSTI ID:
- 6991851
- Report Number(s):
- DOE/JPL/955640-80/3
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
07 ISOTOPES AND RADIATION SOURCES
ELECTRON SOURCES
BEAM PULSERS
DESIGN
SOLAR CELLS
ANNEALING
ION IMPLANTATION
ELECTRON BEAMS
ION SOURCES
KEV RANGE 01-10
PHOSPHORUS IONS
PULSED IRRADIATION
SEMICONDUCTOR JUNCTIONS
BEAMS
CHARGED PARTICLES
DIRECT ENERGY CONVERTERS
ENERGY RANGE
EQUIPMENT
HEAT TREATMENTS
IONS
IRRADIATION
JUNCTIONS
KEV RANGE
LEPTON BEAMS
PARTICLE BEAMS
PARTICLE SOURCES
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
RADIATION SOURCES
SOLAR EQUIPMENT
140501* - Solar Energy Conversion- Photovoltaic Conversion
070201 - Radiation Sources- Design
Fabrication & Operation