Heavy boron doping in low-temperature Si photoepitaxy

Journal Article · Mon Jan 01 00:00:00 EST 1990 · Journal of the Electrochemical Society; (USA)

DOI:https://doi.org/10.1149/1.2086410· OSTI ID:6972286

Yamazaki, T; Watanabe, S; Ito, T ^[1]

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1. Fujitsu Ltd., Tokyo (Japan)

Heavy boron doping of up to 1.5 {times} 10{sup 20} cm{sup {minus} 3} was achieved in a photoepitaxial layer grown at 650{degrees}C. Under UV irradiation, the doped carrier concentration was independent of the diborane flow rate in the heavily doped region and doped boron atoms were completely activated up to 1.5 {times} 10{sup 20} cm{sup {minus} 3}. Without UV irradiation, no single crystals were grown and very few boron atoms were activated in the heavily doped region. The authors studied the crystal quality using Raman scattering spectroscopy and found that, under UV irradiation, single crystals could be grown up to 1.5 {times} 10{sup 20} cm{sup {minus} 3}. The boron atom activation ratio depended strongly on the crystal quality. UV irradiation markedly increased carrier doping efficiency due to photo-enhancement of the diborane vapor phase reaction, which we studied using FTIR and the surface reaction of adsorbed species. The electrical properties of low-temperature photoepitaxial layer with heavy boron doping were studied using a bipolar transistor. Excellent device characteristics were achieved. Low-temperature photoepitaxy also produced very abrupt boron profiles.

• OSTI ID: 6972286
• Journal Information: Journal of the Electrochemical Society; (USA), Vol. 137:1; ISSN 0013-4651
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
74 ATOMIC AND MOLECULAR PHYSICS
BORON
DIFFUSION
THIN FILMS
ELECTRICAL PROPERTIES
ACTIVATION ENERGY
BORON ADDITIONS
CRYSTAL DOPING
LOW TEMPERATURE
PHOTOCHEMISTRY
RAMAN SPECTRA
ULTRAVIOLET RADIATION
VAPOR PHASE EPITAXY
ALLOYS
BORON ALLOYS
CHEMISTRY
ELECTROMAGNETIC RADIATION
ELEMENTS
ENERGY
EPITAXY
FILMS
PHYSICAL PROPERTIES
RADIATIONS
SEMIMETALS
SPECTRA
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Molecular & Chemical Physics- Atomic & Molecular Properties & Theory
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