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Title: Fluidized bed for production of polycrystalline silicon

This patent describes a method for removing silicon powder particles from a reactor that produces polycrystalline silicon by the pyrolysis of a silane containing gas in a fluidized bed reaction zone of silicon seed particles. It comprises introducing the silane containing gas stream into the reaction zone of fluidized silicon seed particles; heterogeneously decomposing the silane containing gas under conditions; collecting the silicon product particles from the collection zone; and removing silicon powder particles from the reactor.
Authors:
Publication Date:
OSTI Identifier:
6958805
Report Number(s):
US 5139762; A
PPN: US 7-551164
Resource Type:
Patent
Resource Relation:
Patent File Date: 11 Jul 1990
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 42 ENGINEERING; 37 INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY; POLYCRYSTALS; FABRICATION; SILANES; FLUIDIZED-BED COMBUSTION; SILICON; GAS FLOW; PYROLYSIS; CHEMICAL REACTIONS; COMBUSTION; CRYSTALS; DECOMPOSITION; ELEMENTS; FLUID FLOW; HYDRIDES; HYDROGEN COMPOUNDS; ORGANIC COMPOUNDS; ORGANIC SILICON COMPOUNDS; OXIDATION; SEMIMETALS; SILICON COMPOUNDS; THERMOCHEMICAL PROCESSES 360601* -- Other Materials-- Preparation & Manufacture; 421000 -- Engineering-- Combustion Systems; 400800 -- Combustion, Pyrolysis, & High-Temperature Chemistry