Fluidized bed for production of polycrystalline silicon

Patent · Tue Aug 18 00:00:00 EDT 1992

OSTI ID:6958805

Flagella, R N

This patent describes a method for removing silicon powder particles from a reactor that produces polycrystalline silicon by the pyrolysis of a silane containing gas in a fluidized bed reaction zone of silicon seed particles. It comprises introducing the silane containing gas stream into the reaction zone of fluidized silicon seed particles; heterogeneously decomposing the silane containing gas under conditions; collecting the silicon product particles from the collection zone; and removing silicon powder particles from the reactor.

• Assignee: Advanced Silicon Materials, Inc., Moses Lake, WA (United States)
• Patent Number(s): US 5139762; A
• Application Number: PPN: US 7-551164
• OSTI ID: 6958805
• Resource Relation: Patent File Date: 11 Jul 1990
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
42 ENGINEERING
37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
POLYCRYSTALS
FABRICATION
SILANES
FLUIDIZED-BED COMBUSTION
SILICON
GAS FLOW
PYROLYSIS
CHEMICAL REACTIONS
COMBUSTION
CRYSTALS
DECOMPOSITION
ELEMENTS
FLUID FLOW
HYDRIDES
HYDROGEN COMPOUNDS
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
OXIDATION
SEMIMETALS
SILICON COMPOUNDS
THERMOCHEMICAL PROCESSES
360601* - Other Materials- Preparation & Manufacture
421000 - Engineering- Combustion Systems
400800 - Combustion
Pyrolysis
& High-Temperature Chemistry