Applications of polysilicon films in microsensors and microactuators
Conference
·
OSTI ID:6928530
This paper reviews the applications of polysilicon in microsensor technology and in the emerging field of microfabricated actuators. Polysilicon is an attractive material for thin-film strain gauges, and is also used to fabricate micromechanical structures. The need for better understanding of the non-electrical properties of polysilicon, such as Young's modulus, residual strain, ultimate strength, friction, and wear, is emphasized. 45 refs., 11 figs.
- Research Organization:
- Lawrence Livermore National Lab., CA (USA); Berkeley Sensor and Actuator Center, CA (USA)
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 6928530
- Report Number(s):
- UCRL-21091; CONF-871124-104; ON: DE88016979
- Resource Relation:
- Conference: Fall meeting of the Materials Research Society, Boston, MA, USA, 30 Nov 1987; Other Information: Portions of this document are illegible in microfiche products
- Country of Publication:
- United States
- Language:
- English
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