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Title: Grain orientation mapping of passivated aluminum interconnect wires with X-ray micro-diffraction

A micro x-ray diffraction facility is under development at the Advanced Light source. Spot sizes are typically about 1-{micro}m size generated by means of grazing incidence Kirkpatrick-Baez focusing mirrors. Photon energy is either white of energy range 6--14 keV or monochromatic generated from a pair of channel cut crystals. A Laue diffraction pattern from a single grain in passivated 2-{micro}m wide bamboo structured Aluminum interconnect line has been recorded. Acquisition times are of the order of a few seconds. The Laue pattern has allowed the determination of the crystallographic orientation of individual grains along the line length. The experimental and analysis procedures used are described, as is a grain orientation result. The future direction of this program is discussed in the context of strain measurements in the area of electromigration.
Authors:
; ;  [1] ; ;  [2]
  1. Lawrence Berkeley National Lab., CA (United States)
  2. Lawrence Berkeley National Lab., CA (United States). Advanced Light Source Div.|[Stanford Univ., CA (United States)
Publication Date:
OSTI Identifier:
677095
Report Number(s):
LBNL--42053; LSBL--477;CONF-980405--
ON: DE98059381; TRN: 99:000827
DOE Contract Number:
AC03-76SF00098
Resource Type:
Technical Report
Resource Relation:
Conference: Spring meeting of the Materials Research Society, San Francisco, CA (United States), 13-17 Apr 1998; Other Information: PBD: Jun 1998
Research Org:
Lawrence Berkeley National Lab., Advanced Light Source Div., Berkeley, CA (United States)
Sponsoring Org:
USDOE Office of Energy Research, Washington, DC (United States)
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; 66 PHYSICS; ACCELERATOR FACILITIES; ADVANCED LIGHT SOURCE; X-RAY DIFFRACTION; LAUE METHOD; INTEGRATED CIRCUITS; ELECTRIC CONTACTS; GRAIN ORIENTATION; ELECTROPHORESIS; EXPERIMENTAL DATA; ALUMINIUM