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Title: Compton backscattered collimated x-ray source

A high-intensity, inexpensive and collimated x-ray source is disclosed for applications such as x-ray lithography is disclosed. An intense pulse from a high power laser, stored in a high-finesse resonator, repetitively collides nearly head-on with and Compton backscatters off a bunched electron beam, having relatively low energy and circulating in a compact storage ring. Both the laser and the electron beams are tightly focused and matched at the interaction region inside the optical resonator. The laser-electron interaction not only gives rise to x-rays at the desired wavelength, but also cools and stabilizes the electrons against intrabeam scattering and Coulomb repulsion with each other in the storage ring. This cooling provides a compact, intense bunch of electrons suitable for many applications. In particular, a sufficient amount of x-rays can be generated by this device to make it an excellent and flexible Compton backscattered x-ray (CBX) source for high throughput x-ray lithography and many other applications. 4 figs.
Authors:
;
Publication Date:
OSTI Identifier:
675852
Report Number(s):
US 5,825,847/A/
PAN: US patent application 8-910,816; TRN: 99:001151
DOE Contract Number:
AC03-76SF00515
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 20 Oct 1998
Research Org:
Stanford University
Sponsoring Org:
USDOE, Washington, DC (United States)
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS; X-RAY SOURCES; DESIGN; MICROELECTRONICS; ELECTRON BEAMS; LASER RADIATION; COLLIDING BEAMS; STORAGE RINGS; USES; COMPTON EFFECT; BACKSCATTERING