A review of the use of Al-alloy vacuum components for operation at 10 sup minus 13 Torr
Abstract
An extremely high vacuum (XHV) chamber was fabricated and tested. The vacuum chamber was made of special surface finished (EX-process) aluminum alloy in oxygen and argon atmosphere. The chamber was assembled using TIG welding in an argon atmosphere and by electron beam welding. The system was evacuated with a turbo-backed 300 l/s turbomolecular pump separated from the main chamber using a right angle valve. The liquid nitrogen shroud is installed inside the main vacuum chamber. The XHV is maintained by two 300 l/s sputter ion pumps and a titanium sublimation pump with a liquid nitrogen shroud. These pumps are also made of aluminum alloys. An ultimate pressure of 3{times}10{sup {minus}13} Torr was measured with a point collector gauge with a spherical anode mounted on an Al-flange. Residual gas analysis in the order 10{sup {minus}13} Torr was performed by a newly developed Q-mass filter. To suppress outgassing from the quadrupole electrode, the ion source is mounted on an Al-flange separated from the quadrupole electrode.
- Authors:
-
- National Laboratory for High Energy Physics, 1-1 Ohi, Tsukuba-shi, Ibaraki-ken, 305 (Japan)
- Publication Date:
- OSTI Identifier:
- 6703453
- Report Number(s):
- CONF-8904230-
Journal ID: ISSN 0094-243X; CODEN: APCPC
- Resource Type:
- Conference
- Journal Name:
- AIP Conference Proceedings (American Institute of Physics); (USA)
- Additional Journal Information:
- Journal Volume: 199:1; Conference: AVS topical conference on surface conditioning of vacuum systems, Los Angeles, CA (USA), 3-5 Apr 1989; Journal ID: ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION; VACUUM SYSTEMS; DESIGN; FABRICATION; ALUMINIUM ALLOYS; DEGASSING; ELECTRON BEAM WELDING; TURBOMOLECULAR PUMPS; ULTRAHIGH VACUUM; ALLOYS; EQUIPMENT; JOINING; LABORATORY EQUIPMENT; PUMPS; VACUUM PUMPS; WELDING; 440800* - Miscellaneous Instrumentation- (1990-)
Citation Formats
Ishimaru, H. A review of the use of Al-alloy vacuum components for operation at 10 sup minus 13 Torr. United States: N. p., 1990.
Web.
Ishimaru, H. A review of the use of Al-alloy vacuum components for operation at 10 sup minus 13 Torr. United States.
Ishimaru, H. 1990.
"A review of the use of Al-alloy vacuum components for operation at 10 sup minus 13 Torr". United States.
@article{osti_6703453,
title = {A review of the use of Al-alloy vacuum components for operation at 10 sup minus 13 Torr},
author = {Ishimaru, H},
abstractNote = {An extremely high vacuum (XHV) chamber was fabricated and tested. The vacuum chamber was made of special surface finished (EX-process) aluminum alloy in oxygen and argon atmosphere. The chamber was assembled using TIG welding in an argon atmosphere and by electron beam welding. The system was evacuated with a turbo-backed 300 l/s turbomolecular pump separated from the main chamber using a right angle valve. The liquid nitrogen shroud is installed inside the main vacuum chamber. The XHV is maintained by two 300 l/s sputter ion pumps and a titanium sublimation pump with a liquid nitrogen shroud. These pumps are also made of aluminum alloys. An ultimate pressure of 3{times}10{sup {minus}13} Torr was measured with a point collector gauge with a spherical anode mounted on an Al-flange. Residual gas analysis in the order 10{sup {minus}13} Torr was performed by a newly developed Q-mass filter. To suppress outgassing from the quadrupole electrode, the ion source is mounted on an Al-flange separated from the quadrupole electrode.},
doi = {},
url = {https://www.osti.gov/biblio/6703453},
journal = {AIP Conference Proceedings (American Institute of Physics); (USA)},
issn = {0094-243X},
number = ,
volume = 199:1,
place = {United States},
year = {Mon Feb 05 00:00:00 EST 1990},
month = {Mon Feb 05 00:00:00 EST 1990}
}