Ion beam assisted deposition of tribological coatings

Technical Report · Sun Jan 01 00:00:00 EST 1989

OSTI ID:6670135

Sartwell, B D; Dillich, S A; Sprague, J A; Kant, R A; Smidt, F A

During this period films prepared under a variety of processing conditions were examined by TEM to explore the relation between hardness and grain boundary porosity. It was found that porosity decreased (and hardness increased) as the Ar[sup +] ion to T atom arrival rate ratio increased. A systematic error in measuring film thickness under varying chamber pressures due to scattering of T atoms near substrate surface by Ar atoms from the ion gun was discovered and the apparatus was modified and recalibrated. Hardness measurements on thick TiN films (1.5-2.5[mu]m) deposited on an M50 steel and Si substrates were performed at 3 loads and compared to a 0.5[mu]m thick film. Effect of increasing R value on hardness was evident at all loads but film thicknesses in excess of 1.5Am were required to produce representative hardness values at 25 gr indent loads. Scratch test adhesion measurements performed on these thick films showed no indication of brittle fracture and no indication of decohesion at loads up to 100N, well above the critical load of 30 Newtons expected for a sputtered TiN film. Additional experiments on effect of residual pressure on film properties were initiated.

• Research Organization: Naval Research Lab., Washington, DC (United States)
• Sponsoring Organization: USDOE; USDOE, Washington, DC (United States)
• DOE Contract Number: AI02-88CE90024
• OSTI ID: 6670135
• Report Number(s): DOE/CE/90024-3; ON: DE93011522
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
07 ISOTOPES AND RADIATION SOURCES
TITANIUM NITRIDES
DEPOSITION
ADHESION
ARGON IONS
FILMS
ION BEAMS
KNOOP HARDNESS
MICROHARDNESS
PROGRESS REPORT
THICKNESS
TRANSMISSION ELECTRON MICROSCOPY
BEAMS
CHARGED PARTICLES
DIMENSIONS
DOCUMENT TYPES
ELECTRON MICROSCOPY
HARDNESS
IONS
MECHANICAL PROPERTIES
MICROSCOPY
NITRIDES
NITROGEN COMPOUNDS
PNICTIDES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
360203* - Ceramics
Cermets
& Refractories- Mechanical Properties
070205 - Radiation Sources- Industrial Applications
Radiation Processing- (1987-)