Selection of substrate orientation and phosphorus flux to achieve p-type carbon doping of Ga{sub 0.5}In{sub 0.5}P by molecular beam epitaxy
- National Renewable Energy Laboratory, 1617 Cole Boulevard, Golden, Colorado 80401 (United States)
We show that the p-type doping of Ga{sub 0.5}In{sub 0.5}P grown by solid-source molecular beam epitaxy using CBr{sub 4} as a carbon source is very strongly dependent upon the phosphorus flux and upon the substrate misorientation from (100). High densities of A-type steps and low phosphorus flux favor the incorporated carbon acting as a p-type dopant. We demonstrate that with the substrate orientation and phosphorus flux chosen to satisfy these two criteria, doping of C:Ga{sub 0.5}In{sub 0.5}P into the mid-10{sup 18}holes/cm{sup 3} range can be achieved for the as-grown material. {copyright} {ital 1997 American Institute of Physics.}
- Research Organization:
- National Renewable Energy Lab. (NREL), Golden, CO (United States)
- DOE Contract Number:
- AC36-83CH10093
- OSTI ID:
- 664442
- Journal Information:
- Applied Physics Letters, Vol. 71, Issue 8; Other Information: PBD: Aug 1997
- Country of Publication:
- United States
- Language:
- English
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