KrF laser-induced ablation and patterning of Y--Ba--Cu--O films
Journal Article
·
· Journal of Applied Physics; (USA)
- Angewandte Physik, Johannes-Kepler-Universitaet Linz, A-4040 Linz (Austria)
- Siemens AG, Research Laboratories, D-8520 Erlangen (Germany)
The ablation and patterning of Y--Ba--Cu--O films on (100) SrTiO{sub 3} and (100) MgO substrates by KrF excimer-laser light projection was investigated. Three different regimes of laser-material interactions were observed. Transition temperatures and critical current densities in laser-fabricated strip lines were investigated.
- OSTI ID:
- 6521643
- Journal Information:
- Journal of Applied Physics; (USA), Vol. 68:5; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
BARIUM OXIDES
ABLATION
CRITICAL CURRENT
ETCHING
LASER RADIATION
TRANSITION TEMPERATURE
COPPER OXIDES
YTTRIUM OXIDES
EXCIMER LASERS
FILMS
HIGH-TC SUPERCONDUCTORS
MAGNESIUM OXIDES
STRONTIUM COMPOUNDS
SUBSTRATES
TITANATES
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
CHALCOGENIDES
COPPER COMPOUNDS
CURRENTS
ELECTRIC CURRENTS
ELECTROMAGNETIC RADIATION
GAS LASERS
LASERS
MAGNESIUM COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RADIATIONS
SUPERCONDUCTORS
SURFACE FINISHING
THERMODYNAMIC PROPERTIES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
360204* - Ceramics
Cermets
& Refractories- Physical Properties
BARIUM OXIDES
ABLATION
CRITICAL CURRENT
ETCHING
LASER RADIATION
TRANSITION TEMPERATURE
COPPER OXIDES
YTTRIUM OXIDES
EXCIMER LASERS
FILMS
HIGH-TC SUPERCONDUCTORS
MAGNESIUM OXIDES
STRONTIUM COMPOUNDS
SUBSTRATES
TITANATES
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
CHALCOGENIDES
COPPER COMPOUNDS
CURRENTS
ELECTRIC CURRENTS
ELECTROMAGNETIC RADIATION
GAS LASERS
LASERS
MAGNESIUM COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RADIATIONS
SUPERCONDUCTORS
SURFACE FINISHING
THERMODYNAMIC PROPERTIES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
360204* - Ceramics
Cermets
& Refractories- Physical Properties