Coulomb interactions in particle beams

Book · Mon Jan 01 00:00:00 EST 1990

OSTI ID:6515211

Jansen, G H ^[1]

---

1. Royal Dutch Shell Lab., Amsterdam (NL)

This book develops analytical and computer models for beams in which Coulomb interactions are important. The research into the different phenomena of Coulomb interactions in particle beams is stimulated by developments in the field of electron beam lithography for VLSI electronics. The standard theory of charged particle optics breaks down for intense beams in which interactions between particles are significant. This monograph is devoted to the theory of these intense beams, which are not only used in VLSI electronics but also in scanning electron microscopes. The theory is also applicable to focused ion beams, which are used in VLSI mask repair.

• OSTI ID: 6515211
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
74 ATOMIC AND MOLECULAR PHYSICS
BEAM-PLASMA SYSTEMS
DESIGN
ELECTRON BEAMS
COULOMB SCATTERING
BEAM OPTICS
CHARGED PARTICLES
COMPUTER CODES
ETCHING
INTEGRATED CIRCUITS
ION BEAMS
MANY-BODY PROBLEM
MONTE CARLO METHOD
PARTICLE INTERACTIONS
SCANNING ELECTRON MICROSCOPY
BASIC INTERACTIONS
BEAMS
ELASTIC SCATTERING
ELECTROMAGNETIC INTERACTIONS
ELECTRON MICROSCOPY
ELECTRONIC CIRCUITS
INTERACTIONS
LEPTON BEAMS
MICROELECTRONIC CIRCUITS
MICROSCOPY
PARTICLE BEAMS
SCATTERING
SURFACE FINISHING
640301* - Atomic
Molecular & Chemical Physics- Beams & their Reactions
656003 - Condensed Matter Physics- Interactions between Beams & Condensed Matter- (1987-)
640304 - Atomic
Molecular & Chemical Physics- Collision Phenomena