Coulomb interactions in particle beams
Abstract
This book develops analytical and computer models for beams in which Coulomb interactions are important. The research into the different phenomena of Coulomb interactions in particle beams is stimulated by developments in the field of electron beam lithography for VLSI electronics. The standard theory of charged particle optics breaks down for intense beams in which interactions between particles are significant. This monograph is devoted to the theory of these intense beams, which are not only used in VLSI electronics but also in scanning electron microscopes. The theory is also applicable to focused ion beams, which are used in VLSI mask repair.
- Authors:
-
- Royal Dutch Shell Lab., Amsterdam (NL)
- Publication Date:
- OSTI Identifier:
- 6515211
- Resource Type:
- Book
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 74 ATOMIC AND MOLECULAR PHYSICS; BEAM-PLASMA SYSTEMS; DESIGN; ELECTRON BEAMS; COULOMB SCATTERING; BEAM OPTICS; CHARGED PARTICLES; COMPUTER CODES; ETCHING; INTEGRATED CIRCUITS; ION BEAMS; MANY-BODY PROBLEM; MONTE CARLO METHOD; PARTICLE INTERACTIONS; SCANNING ELECTRON MICROSCOPY; BASIC INTERACTIONS; BEAMS; ELASTIC SCATTERING; ELECTROMAGNETIC INTERACTIONS; ELECTRON MICROSCOPY; ELECTRONIC CIRCUITS; INTERACTIONS; LEPTON BEAMS; MICROELECTRONIC CIRCUITS; MICROSCOPY; PARTICLE BEAMS; SCATTERING; SURFACE FINISHING; 640301* - Atomic, Molecular & Chemical Physics- Beams & their Reactions; 656003 - Condensed Matter Physics- Interactions between Beams & Condensed Matter- (1987-); 640304 - Atomic, Molecular & Chemical Physics- Collision Phenomena
Citation Formats
Jansen, G H. Coulomb interactions in particle beams. United States: N. p., 1990.
Web.
Jansen, G H. Coulomb interactions in particle beams. United States.
Jansen, G H. 1990.
"Coulomb interactions in particle beams". United States.
@article{osti_6515211,
title = {Coulomb interactions in particle beams},
author = {Jansen, G H},
abstractNote = {This book develops analytical and computer models for beams in which Coulomb interactions are important. The research into the different phenomena of Coulomb interactions in particle beams is stimulated by developments in the field of electron beam lithography for VLSI electronics. The standard theory of charged particle optics breaks down for intense beams in which interactions between particles are significant. This monograph is devoted to the theory of these intense beams, which are not only used in VLSI electronics but also in scanning electron microscopes. The theory is also applicable to focused ion beams, which are used in VLSI mask repair.},
doi = {},
url = {https://www.osti.gov/biblio/6515211},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 1990},
month = {Mon Jan 01 00:00:00 EST 1990}
}
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