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Title: Process and apparatus for formation of photovoltaic compounds

Patent ·
OSTI ID:6407189

The invention relates to a process and apparatus for formation and deposition of thin films on a substrate, in a vacuum, by evaporation of the elements to form a Zn /SUB x/ Cd/sub 1//sub -/ /SUB x/ S compound having a preselected fixed ratio of cadmium to zinc, characterized by the evaporation of cadmium and zinc at a rate the ratio of which is proportional to the stoichiometric ratio of those elements in the intended compound and evaporation of sulfur at a rate of at least twice the combined rates of cadmium and zinc, and at least twice that required by the stoichiometry of the intended compound.

Assignee:
University of Delaware
Patent Number(s):
US 4526809
OSTI ID:
6407189
Resource Relation:
Patent File Date: Filed date 19 Oct 1983; Other Information: PAT-APPL-543548
Country of Publication:
United States
Language:
English