Process and apparatus for formation of photovoltaic compounds
Patent
·
OSTI ID:6407189
The invention relates to a process and apparatus for formation and deposition of thin films on a substrate, in a vacuum, by evaporation of the elements to form a Zn /SUB x/ Cd/sub 1//sub -/ /SUB x/ S compound having a preselected fixed ratio of cadmium to zinc, characterized by the evaporation of cadmium and zinc at a rate the ratio of which is proportional to the stoichiometric ratio of those elements in the intended compound and evaporation of sulfur at a rate of at least twice the combined rates of cadmium and zinc, and at least twice that required by the stoichiometry of the intended compound.
- Assignee:
- University of Delaware
- Patent Number(s):
- US 4526809
- OSTI ID:
- 6407189
- Resource Relation:
- Patent File Date: Filed date 19 Oct 1983; Other Information: PAT-APPL-543548
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
14 SOLAR ENERGY
CADMIUM SULFIDE SOLAR CELLS
FABRICATION
CADMIUM SULFIDES
VACUUM COATING
ZINC SULFIDE SOLAR CELLS
ZINC SULFIDES
SUBSTRATES
THIN FILMS
CADMIUM COMPOUNDS
CHALCOGENIDES
DEPOSITION
DIRECT ENERGY CONVERTERS
EQUIPMENT
FILMS
INORGANIC PHOSPHORS
PHOSPHORS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SULFIDES
SULFUR COMPOUNDS
SURFACE COATING
ZINC COMPOUNDS
140501* - Solar Energy Conversion- Photovoltaic Conversion
CADMIUM SULFIDE SOLAR CELLS
FABRICATION
CADMIUM SULFIDES
VACUUM COATING
ZINC SULFIDE SOLAR CELLS
ZINC SULFIDES
SUBSTRATES
THIN FILMS
CADMIUM COMPOUNDS
CHALCOGENIDES
DEPOSITION
DIRECT ENERGY CONVERTERS
EQUIPMENT
FILMS
INORGANIC PHOSPHORS
PHOSPHORS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SULFIDES
SULFUR COMPOUNDS
SURFACE COATING
ZINC COMPOUNDS
140501* - Solar Energy Conversion- Photovoltaic Conversion