Studies of silicon cluster--metal atom compound formation in a supersonic molecular beam

Journal Article · Thu Oct 01 00:00:00 EDT 1987 · J. Chem. Phys.; (United States)

DOI:https://doi.org/10.1063/1.452877· OSTI ID:6208168

Beck, S M

The first observation of a reaction between a metal atom and silicon in a supersonic jet to form metal atom silicon clusters is reported. Using the technique of laser vaporization supersonic expansion with metal carbonyl seeded carrier gas, clusters of the form MSi/sub n/ have been detected by ArF and KrF laser photoionization time-of-flight mass spectrometry. Three transition metals have been investigated, Cr, Mo, and W. The dominant product cluster peaks observed in the mass spectra obtained for all three metals corresponds to identical but remarkable cluster stoichiometries. The dominant peaks have formulas given by MSi/sub n/ where n = 15 and n = 16. The metal--semiconductor clusters are relatively more stable towards photofragmentation than the bare silicon cluster of the same size. The observation of these new species may be relevant to reactions which occur at the interface between a silicon wafer and deposited metals.

• Research Organization: Optical Physics Department, The Aerospace Corporation, P.O. Box 92957 Los Angeles, California 90009
• OSTI ID: 6208168
• Journal Information: J. Chem. Phys.; (United States), Vol. 87:7
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
CHROMIUM
CHEMICAL REACTIONS
MOLECULAR BEAMS
SUPERSONIC FLOW
MOLYBDENUM
SILICON
TUNGSTEN
MASS SPECTROSCOPY
BEAMS
ELEMENTS
FLUID FLOW
METALS
SEMIMETALS
SPECTROSCOPY
TRANSITION ELEMENTS
640301* - Atomic
Molecular & Chemical Physics- Beams & their Reactions