Properties of the ablation process for excimer laser ablation of Y sub 1 Ba sub 2 Cu sub 3 O sub 7

Neifeld, R A; Potenziani, E; Sinclair, W R; Hill, III, W T; Turner, B; Pinkas, A

doi:10.1063/1.347380

Title: Properties of the ablation process for excimer laser ablation of Y sub 1 Ba sub 2 Cu sub 3 O sub 7

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Abstract

The process of excimer laser ablation has been studied while varying the laser fluence from 0.237 to 19.1 J/cm{sup 2}. Ion time-of-flight, total charge, target etch depth per pulse, and etch volume per pulse have been measured. Results indicate a maximum ablation volume and minimum ionization fraction occur near 5 J/cm{sup 2}. Several of the parameters measured vary rapidly in the 1--5 J/cm{sup 2} range. Variation in these parameters strongly influences the properties of films grown by this technique.

Authors:

Neifeld, R A; Potenziani, E ^[1]; Sinclair, W R ^[2]; Hill, III, W T; Turner, B; Pinkas, A ^[3]

United States Army, Electronics Technology and Devices Laboratory, Fort Monmouth, New Jersey 07703-5000 (US)
Martin Goffman Associates, 3 Dellview Drive, Edison, New Jersey 08820-2545 (US)
Institute for Physical Science and Technology, University of Maryland, College Park, Maryland 20742 (US)

Publication Date:: Tue Jan 15 00:00:00 EST 1991

OSTI Identifier:: 5999776

Resource Type:: Journal Article

Journal Name:: Journal of Applied Physics; (USA)

Additional Journal Information:: Journal Volume: 69:2; Journal ID: ISSN 0021-8979

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; BARIUM OXIDES; ABLATION; COPPER OXIDES; YTTRIUM OXIDES; DEPOSITION; ENERGY DEPENDENCE; EXCIMER LASERS; FILMS; ION COLLISIONS; PULSES; ALKALINE EARTH METAL COMPOUNDS; BARIUM COMPOUNDS; CHALCOGENIDES; COLLISIONS; COPPER COMPOUNDS; GAS LASERS; LASERS; OXIDES; OXYGEN COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; YTTRIUM COMPOUNDS; 360204* - Ceramics, Cermets, & Refractories- Physical Properties

Citation Formats


                    Neifeld, R A, Potenziani, E, Sinclair, W R, Hill, III, W T, Turner, B, and Pinkas, A. Properties of the ablation process for excimer laser ablation of Y sub 1 Ba sub 2 Cu sub 3 O sub 7.  United States: N. p., 1991. 
        Web.  doi:10.1063/1.347380.

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                    Neifeld, R A, Potenziani, E, Sinclair, W R, Hill, III, W T, Turner, B, & Pinkas, A. Properties of the ablation process for excimer laser ablation of Y sub 1 Ba sub 2 Cu sub 3 O sub 7.  United States.  https://doi.org/10.1063/1.347380

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                    Neifeld, R A, Potenziani, E, Sinclair, W R, Hill, III, W T, Turner, B, and Pinkas, A. 1991.  
        "Properties of the ablation process for excimer laser ablation of Y sub 1 Ba sub 2 Cu sub 3 O sub 7".  United States.  https://doi.org/10.1063/1.347380.

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@article{osti_5999776,

  title        = {Properties of the ablation process for excimer laser ablation of Y sub 1 Ba sub 2 Cu sub 3 O sub 7},

  author       = {Neifeld, R A and Potenziani, E and Sinclair, W R and Hill, III, W T and Turner, B and Pinkas, A},

  abstractNote = {The process of excimer laser ablation has been studied while varying the laser fluence from 0.237 to 19.1 J/cm{sup 2}. Ion time-of-flight, total charge, target etch depth per pulse, and etch volume per pulse have been measured. Results indicate a maximum ablation volume and minimum ionization fraction occur near 5 J/cm{sup 2}. Several of the parameters measured vary rapidly in the 1--5 J/cm{sup 2} range. Variation in these parameters strongly influences the properties of films grown by this technique.},

  doi          = {10.1063/1.347380},

  url          = {https://www.osti.gov/biblio/5999776},
  journal      = {Journal of Applied Physics; (USA)},

  issn         = {0021-8979},

  number       = ,

  volume       = 69:2,

  place        = {United States},

  year         = {Tue Jan 15 00:00:00 EST 1991},

  month        = {Tue Jan 15 00:00:00 EST 1991}

}

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