Effect of a residual atmosphere containing carbon on the electrophysical properties of titanium and vanadium surface layers deposited on Si(SiO/sub 2/) in a vacuum

Journal Article · Tue Jul 01 00:00:00 EDT 1986 · Sov. Microelectron.; (United States)

OSTI ID:5895713

Derkach, V P; Belousov, I V

The authors consider the effect of a carbon-containing residual atmosphere on the superconductive properties and chemical composition of a silicide grown on an SiO/sub 2/ surface by deposition of V in a vacuum, as well as the rectifying properties of Ti-n-Si and V-p-Si contacts formed by deposition of Ti and V on Si in vacuum. The V and Ti films were deposited in vacuum at a residual gas pressure of no more than (2-8) x 10/sup -4/ Pa on an Si(SiO/sub 2/) surface heated to 200-1200/sup 0/C. Subsequent high-temperature annealing of the V-p-Si structures at temperatures of 200-1200/sup 0/C was performed in the vacuum chamber after depositing the vanadium layer for 15-30 min. In a solid-state reaction on the V-SiO/sub 2/ phase boundary, the superconductive silicide V/sub 3/Si is formed and grows, while on the V-Si boundary, VSi/sub 2/ is formed. When a vanadium film of thickness d = 50 nm is grown on SiO/sub 2/, and heated to 1000/sup 0/C in a vacuum with a carbon-containing residual atmosphere, the phase VSi/sub 2/ is formed, and only when the vanadium thickness is increased does V/sub 3/Si form and superconductive properties appear in the surface layer.

• OSTI ID: 5895713
• Journal Information: Sov. Microelectron.; (United States), Vol. 14:6; Other Information: Translated from Mikroelektronika Akad. Nauk SSSR; 14: No. 6, 548-551(Nov-Dec 1985)
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
CARBON
METALLURGICAL EFFECTS
TITANIUM
VACUUM COATING
TITANIUM SILICIDES
SUPERCONDUCTIVITY
VANADIUM
VANADIUM SILICIDES
ANNEALING
IMPURITIES
PHASE STUDIES
SILICON
SILICON OXIDES
SUBSTRATES
SUPERCONDUCTING FILMS
TITANIUM CARBIDES
TRANSITION TEMPERATURE
VANADIUM CARBIDES
VAPOR DEPOSITED COATINGS
CARBIDES
CARBON COMPOUNDS
CHALCOGENIDES
COATINGS
DEPOSITION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTS
FILMS
HEAT TREATMENTS
METALS
NONMETALS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SEMIMETALS
SILICIDES
SILICON COMPOUNDS
SURFACE COATING
THERMODYNAMIC PROPERTIES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
VANADIUM COMPOUNDS
360104* - Metals & Alloys- Physical Properties
360102 - Metals & Alloys- Structure & Phase Studies
360202 - Ceramics
Cermets
& Refractories- Structure & Phase Studies