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Title: Compact storage rings Siberia-AS and Siberia-SM synchrotron radiation sources for lithography

Abstract

The paper deals with two projects of compact superconducting storage rings for industrial production of integrated circuits (IC) using x-ray lithography within the 8- to 20-A wavelengths range. The azimuthally symmetric superconducting storage ring Siberia-AS at an energy of 600 MeV is a superconducting analog of VEP-1, one of the earliest storage rings in the world intended for the purposes of high-energy physics. Unlike the conventional design, no iron yoke is used in the storage ring under consideration to form the magnetic field at the equilibrium orbit and to close the return magnetic flux---this is performed by some inner and outer superconducting windings. Such a scheme enables the size of the storage ring to be substantially reduced (a cylinder of 2 m in diameter and 2 m long), and as a result, its weight decreases, too (about 10 tons). The eight-magnet storage ring Siberia-SM is of four-order symmetry so that the periodicity element comprises two rectangular magnets and three lenses. Its basic component is a superconducting bending rectangular magnet at a 6-T magnetic field. Two variants of such magnets have been proposed: in the first, the iron yoke is utilized to form the magnetic field and to close the returnmore » flux, while the second is an ironless C-shaped magnet manufactured on the basis of original wedgelike coils.« less

Authors:
; ; ; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Institute of Nuclear Physics, 630090 Novosibirsk, USSR (SU)
OSTI Identifier:
5819234
Resource Type:
Journal Article
Journal Name:
Rev. Sci. Instrum.; (United States)
Additional Journal Information:
Journal Volume: 60:7
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS; SYNCHROTRON RADIATION SOURCES; DESIGN; INDUSTRY; INTEGRATED CIRCUITS; STORAGE RINGS; SUPERCONDUCTING MAGNETS; SYMMETRY; USSR; ASIA; EASTERN EUROPE; ELECTRICAL EQUIPMENT; ELECTROMAGNETS; ELECTRONIC CIRCUITS; EQUIPMENT; EUROPE; MAGNETS; MICROELECTRONIC CIRCUITS; RADIATION SOURCES; SUPERCONDUCTING DEVICES; 430400* - Particle Accelerators- Storage Rings

Citation Formats

Anashin, V V, Arbuzov, V S, Blinov, G A, Veshcherevich, V G, Vobly, P D, Gorniker, E I, Zinevich, N I, Zinin, E I, Zubkov, N I, Kiselev, V A, and others, and. Compact storage rings Siberia-AS and Siberia-SM synchrotron radiation sources for lithography. United States: N. p., 1989. Web. doi:10.1063/1.1140949.
Anashin, V V, Arbuzov, V S, Blinov, G A, Veshcherevich, V G, Vobly, P D, Gorniker, E I, Zinevich, N I, Zinin, E I, Zubkov, N I, Kiselev, V A, & others, and. Compact storage rings Siberia-AS and Siberia-SM synchrotron radiation sources for lithography. United States. https://doi.org/10.1063/1.1140949
Anashin, V V, Arbuzov, V S, Blinov, G A, Veshcherevich, V G, Vobly, P D, Gorniker, E I, Zinevich, N I, Zinin, E I, Zubkov, N I, Kiselev, V A, and others, and. 1989. "Compact storage rings Siberia-AS and Siberia-SM synchrotron radiation sources for lithography". United States. https://doi.org/10.1063/1.1140949.
@article{osti_5819234,
title = {Compact storage rings Siberia-AS and Siberia-SM synchrotron radiation sources for lithography},
author = {Anashin, V V and Arbuzov, V S and Blinov, G A and Veshcherevich, V G and Vobly, P D and Gorniker, E I and Zinevich, N I and Zinin, E I and Zubkov, N I and Kiselev, V A and others, and},
abstractNote = {The paper deals with two projects of compact superconducting storage rings for industrial production of integrated circuits (IC) using x-ray lithography within the 8- to 20-A wavelengths range. The azimuthally symmetric superconducting storage ring Siberia-AS at an energy of 600 MeV is a superconducting analog of VEP-1, one of the earliest storage rings in the world intended for the purposes of high-energy physics. Unlike the conventional design, no iron yoke is used in the storage ring under consideration to form the magnetic field at the equilibrium orbit and to close the return magnetic flux---this is performed by some inner and outer superconducting windings. Such a scheme enables the size of the storage ring to be substantially reduced (a cylinder of 2 m in diameter and 2 m long), and as a result, its weight decreases, too (about 10 tons). The eight-magnet storage ring Siberia-SM is of four-order symmetry so that the periodicity element comprises two rectangular magnets and three lenses. Its basic component is a superconducting bending rectangular magnet at a 6-T magnetic field. Two variants of such magnets have been proposed: in the first, the iron yoke is utilized to form the magnetic field and to close the return flux, while the second is an ironless C-shaped magnet manufactured on the basis of original wedgelike coils.},
doi = {10.1063/1.1140949},
url = {https://www.osti.gov/biblio/5819234}, journal = {Rev. Sci. Instrum.; (United States)},
number = ,
volume = 60:7,
place = {United States},
year = {Sat Jul 01 00:00:00 EDT 1989},
month = {Sat Jul 01 00:00:00 EDT 1989}
}