Neutron-induced reactions and secondary-ion mass spectrometry: complementary tools for depth profiling. Final report

Technical Report · Fri Jan 01 00:00:00 EST 1982

OSTI ID:5666267

Downing, G; Fleming, R; Simons, D; Newbury, D

The technique of neutron depth profiling is based upon inducing nuclear reactions by bombardment with low-energy neutrons. The nuclear reactions result in the emission of high-energy alpha particles or protons. The energy spectrum of the emitted particles is used to derive a depth distribution by transforming the energy loss into an equivalent depth by stopping-power calculations. Depth profiles of bismuth distributions in silicon and tin have been measured by both neutron depth profiling and secondary ion mass spectrometry. Information from both techniques can be used synergistically to aid in a full characterization of the depth distribution.

• Research Organization: National Bureau of Standards, Washington, DC (USA)
• OSTI ID: 5666267
• Report Number(s): PB-85-172203
• Country of Publication: United States
• Language: English

Related Subjects

73 NUCLEAR PHYSICS AND RADIATION PHYSICS
BISMUTH
NEUTRON REACTIONS
IONS
SECONDARY EMISSION
DEPTH DOSE DISTRIBUTIONS
MASS SPECTROSCOPY
BARYON REACTIONS
CHARGED PARTICLES
ELEMENTS
EMISSION
HADRON REACTIONS
METALS
NUCLEAR REACTIONS
NUCLEON REACTIONS
RADIATION DOSE DISTRIBUTIONS
SPATIAL DOSE DISTRIBUTIONS
SPECTROSCOPY
654003* - Radiation & Shielding Physics- Neutron Interactions with Matter