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Title: Analysis of trimethylgallium with inductively coupled plasma spectrometry

Conference · · Anal. Chem.; (United States)
OSTI ID:5569795

Two methods for the analysis of trimethylgallium (TMG) are described. Since TMG is pyrophoric and volatile and the nature of its impurity species is not known, separate methods were employed for volatile and nonvolatile impurities. The nonvolatile impurities (Al, Cu, Fe, Mg) were determined by inductively coupled plasma atomic emission spectrometry (ICP-AES) in an aqueous solution of decomposed TMG with conventional nebulization. The volatile impurity silicon in TMG also was determined by ICP-AES but with exponential dilution. A known quantity of TMG was placed in an exponential dilution flask, and argon swept the vapor out of the flask into the plasma. Limits of detection in 1 g of TMG were 2 ..mu..g of Al, 0.6 ..mu..g of Fe, 0.6 ..mu..g of Cu, and 0.08 ..mu..g of Mg. The Si detection limit was 0.6 ..mu..g. The analysis precision for practical samples was 10-20%.

Research Organization:
Univ. of Massachusetts, Amherst
OSTI ID:
5569795
Journal Information:
Anal. Chem.; (United States), Vol. 58:8; Conference: 23. colloquium spectroscopicum internationale, Amsterdam, Netherlands, Jul 1983
Country of Publication:
United States
Language:
English