Measurement of soft x-ray multilayer mirror reflectance at normal incidence using laser-produced plasmas

Journal Article · Mon Jan 25 00:00:00 EST 1988 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.99490· OSTI ID:5531947

Trail, J A; Byer, R L; Barbee, Jr, T W

We have used laser-produced plasmas as a broadband source of soft x rays to measure the normal incidence reflectance of multilayer mirrors in the 10--25 nm spectral region. The measurements have a spectral resolution of 0.03 nm and a reflectance resolution of 10%. Measurements made on a Mo/Si multilayer show excellent agreement with results obtained using a synchrotron and indicate a normal incidence peak reflectance of over 50% at 15 nm. By repeating the reflectance measurement at different positions across a single 7.5 cm mirror we determined multilayer uniformity as a function of position and we relate this dependence to the geometry of the deposition process.

• Research Organization: Department of Applied Physics, Stanford University, Stanford, California 94305
• OSTI ID: 5531947
• Journal Information: Appl. Phys. Lett.; (United States), Vol. 52:4
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
MIRRORS
DESIGN
REFLECTIVITY
MOLYBDENUM
SILICON
X-RAY SOURCES
EXPERIMENTAL DATA
LASER-PRODUCED PLASMA
LAYERS
OPTICAL PROPERTIES
SOFT X RADIATION
DATA
ELECTROMAGNETIC RADIATION
ELEMENTS
EQUIPMENT
INFORMATION
IONIZING RADIATIONS
METALS
NUMERICAL DATA
PHYSICAL PROPERTIES
PLASMA
RADIATION SOURCES
RADIATIONS
SEMIMETALS
SURFACE PROPERTIES
TRANSITION ELEMENTS
X RADIATION
X-RAY EQUIPMENT
360104* - Metals & Alloys- Physical Properties
360603 - Materials- Properties