Phenolic dyes as nonbleachable absorbers compatible with novolac resins for linewidth control in photoresists

Patent Application · Mon Oct 17 00:00:00 EDT 1988

OSTI ID:5409799

Renschler, C L

Photoresist techniques and compositions are provided employing curcumin as an absorptive dye for the purpose of reducing linewidth non-uniformity caused by scattered and reflective light from the substrate-resist interface. The photoresist compositions containing curcumin as the absorptive dye are used in the production of microelectronic circuitry by both single layer and multilayer photoresist techniques. 2 figs.

• Research Organization: Sandia National Labs., Albuquerque, NM (United States)
• Sponsoring Organization: USDOE; USDOE, Washington, DC (United States)
• DOE Contract Number: AC04-76DP00789
• Assignee: Dept. of Energy
• Patent Number(s): PATENTS-US-A7258543
• Application Number: ON: DE91016973; PPN: US 7-258543
• OSTI ID: 5409799
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
42 ENGINEERING
DYES
ABSORPTIVITY
CURCUMIN
ETCHING
INVENTIONS
MICROELECTRONIC CIRCUITS
PHOTORESISTORS
RESINS
AROMATICS
ELECTRICAL EQUIPMENT
ELECTRONIC CIRCUITS
EQUIPMENT
ETHERS
HYDROXY COMPOUNDS
KETONES
OPTICAL PROPERTIES
ORGANIC COMPOUNDS
ORGANIC OXYGEN COMPOUNDS
ORGANIC POLYMERS
PETROCHEMICALS
PETROLEUM PRODUCTS
PHENOLS
PHYSICAL PROPERTIES
POLYMERS
POLYPHENOLS
RESISTORS
SURFACE FINISHING
360603* - Materials- Properties
426000 - Engineering- Components
Electron Devices & Circuits- (1990-)