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Title: Method for producing high quality thin layer films on substrates

A method for producing high quality, thin layer films of inorganic compounds upon the surface of a substrate is disclosed. The method involves condensing a mixture of preselected molecular precursors on the surface of a substrate and subsequently inducing the formation of reactive species using high energy photon or charged particle irradiation. The reactive species react with one another to produce a film of the desired compound upon the surface of the substrate. 4 figures.
Authors:
; ;
Publication Date:
OSTI Identifier:
5113439
Report Number(s):
US 5306530; A
PPN: US 7-980496
DOE Contract Number:
AC02-76CH00016
Resource Type:
Patent
Resource Relation:
Patent File Date: 23 Nov 1992
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; INORGANIC COMPOUNDS; CHEMICAL COATING; THIN FILMS; CHARGED PARTICLES; PHOTON BEAMS; PRECURSOR; BEAMS; DEPOSITION; FILMS; SURFACE COATING 360601* -- Other Materials-- Preparation & Manufacture