Determination of plate contours with a servo-scanning interferometer
Journal Article
·
· Opt. Eng.; (United States)
OSTI ID:5079083
The history of Badoz's principle of linear detection of fringes having a potential precision of 5 x 10/sup -6/ orders and its applications to the measurement of birefringence, to ellipsometry, and to interferometry are given. The application of the principle to a servo-scanning interferometer (Twyman-Green configuration) for the calibration of the instrument, the analysis of the data, and the determination of the absolute contour of small plates is described. The problems of the interferometry and the determination of absolute contours, and the prospects for improving the precision from that attained, 1/70 fringe, to the very much greater potential of Badoz's principle are discussed.
- Research Organization:
- Argonne National Lab., IL
- OSTI ID:
- 5079083
- Journal Information:
- Opt. Eng.; (United States), Vol. 20:3
- Country of Publication:
- United States
- Language:
- English
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