In situ electron spectroscopic identification of carbon species deposited by laser ablation
- IFUNAM, Ensenada (Mexico). Lab. de Ensenada
Thin carbon films were grown on Si (111) substrates by ablating a graphite target utilizing an excimer pulsed laser in a UHV Riber {copyright} LDM-32 system. Two kinds of films were produced, a highly oriented pyrolytic graphite (HOPG) type and a diamond-like carbon (DLC) type. A relationship of the films microstructure with laser power density and substrate conditions was observed. The HOPG films were homogeneous but the DLC films were heterogeneous, as shown by micrographs. The thin films are monitored and analyzed in situ during the first stages of the deposition process. The monitoring was done by RHEED and the characterization by several surface spectroscopic techniques, AES, XPS and EELS. The formation of a SiC interface was observed for both films due to the reaction of the first carbon species with the substrate surface.
- Sponsoring Organization:
- Consejo Nacional de Ciencia y Tecnologia (CONACYT), Mexico City (Mexico)
- OSTI ID:
- 467619
- Report Number(s):
- CONF-960401-; ISBN 1-55899-339-8; TRN: IM9721%%47
- Resource Relation:
- Conference: Spring meeting of the Materials Research Society (MRS), San Francisco, CA (United States), 8-12 Apr 1996; Other Information: PBD: 1997; Related Information: Is Part Of Thin films: Stresses and mechanical properties VI; Gerberich, W.W. [ed.] [Univ. of Minnesota, Minneapolis, MN (United States)]; Gao, H. [ed.] [Stanford Univ., CA (United States)]; Sundgren, J.E. [ed.] [Linkoeping Univ. (Sweden)]; Baker, S.P. [ed.] [Max-Planck-Inst. fuer Metallforschung, Stuttgart (Germany)]; PB: 559 p.; Materials Research Society symposium proceedings, Volume 436
- Country of Publication:
- United States
- Language:
- English
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