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Title: Micromachining technology for advanced weapon systems

An overview of planned uses for polysilicon surface-micromachining technology in advanced weapon systems is presented. Specifically, this technology may allow consideration of fundamentally new architectures for realization of surety component functions.
Authors:
Publication Date:
OSTI Identifier:
454020
Report Number(s):
SAND--96-1934C; CONF-970329--4
ON: DE97001878
DOE Contract Number:
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: Government microcircuit applications conference: power electronics - from micro to kilo and beyond, Las Vegas, NV (United States), 10-14 Mar 1997; Other Information: PBD: [1996]
Research Org:
Sandia National Labs., Albuquerque, NM (United States)
Sponsoring Org:
USDOE, Washington, DC (United States)
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; 32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION; INTEGRATED CIRCUITS; FABRICATION; EQUIPMENT INTERFACES; MACHINE PARTS; MICROELECTRONICS; SURFACE COATING; SURFACE FINISHING; SURFACE TREATMENTS; SILICON OXIDES; LAYERS; ELECTRIC CONDUCTORS; CONNECTORS; CHEMICAL POLISHING; MECHANICAL POLISHING