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Title: Interaction of copper metallization with rare-earth metals and silicides

Solid-phase reactions of copper films with underlying gadolinium, erbium, and erbium{endash}silicide layers on Si(100) substrates were investigated. For the phase analysis, x-ray diffraction and cross-sectional transmission electron microscopy were used. In the case of Cu/Gd/Si(100), an orthorhombic GdSi{sub 2} formed, and, at higher temperatures, copper aggregated into islands. Annealed Cu/Er/Si(100) samples resulted in a hexagonal Er{sub 5}Si{sub 3} phase. In the Cu/ErSi{sub 2{minus}x}/Si system, the copper catalyzes the transformation of the highly oriented hexagonal ErSi{sub 2{minus}x} phase into hexagonal Er{sub 5}Si{sub 3}. Diverse phase developments of the samples with Gd and Er are based on reactivity differences of the two rare-earth metals. {copyright} 2001 American Institute of Physics.
Authors:
; ; ;
Publication Date:
OSTI Identifier:
40204403
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 90; Journal Issue: 1; Other Information: DOI: 10.1063/1.1378054; Othernumber: JAPIAU000090000001000503000001; 001114JAP; PBD: 1 Jul 2001
Publisher:
The American Physical Society
Sponsoring Org:
(US)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; COPPER; ERBIUM; GADOLINIUM; ISLANDS; PHYSICS; SILICIDES; SUBSTRATES; TRANSFORMATIONS; TRANSMISSION ELECTRON MICROSCOPY; X-RAY DIFFRACTION