Generation of soft x-ray radiation by laser irradiation of a gas puff xenon target
- Military Univ. of Technology, Warsaw (Poland). Inst. of Optoelectronics; and others
Plasmas produced from laser-irradiated gas puff xenon targets, created by pulsed injection of xenon with high-pressure solenoid valve, offer the possibility of realizing a debrisless x-ray point source for the x-ray lithography applications. In this paper the authors present results of the experimental investigations on the x-ray generation from a gas puff xenon target irradiated with nanosecond high-power laser pulses produced using two different laser facilities: a Nd:glass laser operating at 1.06 {micro}m, which generated 10--15 J pulses in 1 ns FWHM, and Nd:glass slab laser, producing pulses of 10 ns duration with energy reaching 12 J for a 0.53 {micro}m wavelength or 20 J for 1.05 {micro}m. To study the x-ray emission different x-ray diagnostic methods have been used. X-ray spectra were registered using a flat CsAP crystal spectrograph with an x-ray film or a curved KAP crystal spectrograph with a convex curvature to an x-ray CCD readout detector. X-ray images have been taken using pinhole cameras with an x-ray film or a CCD array. X-ray yield was measured with the use of semiconductor detectors (silicon photodiodes or diamond photoconductors).
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 379729
- Report Number(s):
- CONF-9507222-; ISBN 0-8194-1882-X; TRN: 96:025243
- Resource Relation:
- Conference: SPIE applications of laser plasma radiation II, San Diego, CA (United States), 12-14 Jul 1995; Other Information: PBD: 1995; Related Information: Is Part Of Applications of laser plasma radiation 2; Richardson, M.C.; Kyrala, G.A. [eds.]; PB: 333 p.; Proceedings/SPIE, Volume 2523
- Country of Publication:
- United States
- Language:
- English
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