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Title: Uniform and large area deposition of diamond-like carbon using RF source ion beam

Abstract

The authors have designed and constructed a large area ion beam apparatus to deposit DLC films onto 1,000 cm{sup 2} surfaces with various geometries. The use of an efficient RF excited ion gun (13.56 MHz, 1 kW power, 50--3,000 eV ion energy) with a diameter of 20 cm, enables one to generate various hydrocarbon ions with high ion beam currents, varying ionic species and less maintenance. The use of a four axis (X-Y-{theta}Y-{theta}Z) substrate scanner with computer control can produce uniform DLC films on large areas and curved surfaces. The effects of RF power, ion energy, gaseous composition, and total pressure on the properties of DLC have been systematically investigated.

Authors:
;  [1]; ;  [2]; ;  [3]
  1. UES, Inc., Dayton, OH (United States)
  2. NASA Lewis Research Center, Cleveland, OH (United States)
  3. Wright Lab., Wright-Patterson AFB, OH (United States)
Publication Date:
OSTI Identifier:
375923
Report Number(s):
CONF-941144-
ISBN 1-55899-255-3; TRN: IM9642%%11
Resource Type:
Book
Resource Relation:
Conference: Fall meeting of the Materials Research Society (MRS), Boston, MA (United States), 28 Nov - 9 Dec 1994; Other Information: PBD: 1995; Related Information: Is Part Of Beam-solid interactions for materials synthesis and characterization; Jacobson, D.C. [ed.] [AT and T Bell Labs., Murray Hill, NJ (United States)]; Luzzi, D.E. [ed.] [Univ. of Pennsylvania, Philadelphia, PA (United States)]; Heinz, T.F. [ed.] [Columbia Univ., New York, NY (United States)]; Iwaki, Masaya [ed.] [Inst. of Physical and Chemical Research, Wako, Saitama (Japan)]; PB: 763 p.; Materials Research Society symposium proceedings, Volume 354
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; CARBON; ENERGY BEAM DEPOSITION; IONIC COMPOSITION; COMPUTERIZED CONTROL SYSTEMS; PROCESS CONTROL; EXPERIMENTAL DATA

Citation Formats

Wu, R L.C., Lanter, W, Miyoshi, K, Heidger, S L, Bletzinger, P, and Garscadden, A. Uniform and large area deposition of diamond-like carbon using RF source ion beam. United States: N. p., 1995. Web.
Wu, R L.C., Lanter, W, Miyoshi, K, Heidger, S L, Bletzinger, P, & Garscadden, A. Uniform and large area deposition of diamond-like carbon using RF source ion beam. United States.
Wu, R L.C., Lanter, W, Miyoshi, K, Heidger, S L, Bletzinger, P, and Garscadden, A. 1995. "Uniform and large area deposition of diamond-like carbon using RF source ion beam". United States.
@article{osti_375923,
title = {Uniform and large area deposition of diamond-like carbon using RF source ion beam},
author = {Wu, R L.C. and Lanter, W and Miyoshi, K and Heidger, S L and Bletzinger, P and Garscadden, A},
abstractNote = {The authors have designed and constructed a large area ion beam apparatus to deposit DLC films onto 1,000 cm{sup 2} surfaces with various geometries. The use of an efficient RF excited ion gun (13.56 MHz, 1 kW power, 50--3,000 eV ion energy) with a diameter of 20 cm, enables one to generate various hydrocarbon ions with high ion beam currents, varying ionic species and less maintenance. The use of a four axis (X-Y-{theta}Y-{theta}Z) substrate scanner with computer control can produce uniform DLC films on large areas and curved surfaces. The effects of RF power, ion energy, gaseous composition, and total pressure on the properties of DLC have been systematically investigated.},
doi = {},
url = {https://www.osti.gov/biblio/375923}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Sun Dec 31 00:00:00 EST 1995},
month = {Sun Dec 31 00:00:00 EST 1995}
}

Book:
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