High current metal ion implantation facility

Conference · Thu Dec 31 00:00:00 EST 1998

OSTI ID:346866

Oztarhan, A ^[1]; Brown, I G ^[2]; Evans, P; Watt, G ^[3]; Bakkaloglu, C; Eltas, A S ^[4]; Oks, E ^[5]

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1. Dokuz Eylul Univ., Izmir (Turkey)
2. Lawrence Berkeley Lab., CA (United States)
3. ANSTO, Lucas Heights (Australia). Physics Div.
4. Ataturk Organyze San., Izmir (Turkey)
5. Russian Academy of Sciences, Tomsk (Russian Federation). High Current Electronics Inst.

A vacuum arc ion source based metal ion implantation facility has been established at Dokuz Eylul University, Izmir, Turkey and a surface modification research and development program is underway. The system is similar to the one in Lawrence Berkeley Laboratory which was first built and developed by Brown et al. The broad-beam ion source is repetitively pulsed at rates up to {approximately}10 pulses per second (can be increased to 50 pulses per second) and the extracted ion beam current can be up to {approximately}1 Amp. peak or {approximately}10 mA time averaged. The ion source extraction voltage was increased to 60 kV corresponding to mean beam energies of up to 150 keV or more because of the ion charge state multiplicity (extraction voltage can be increased to 100 kV if desired). Commissioning of the facility is in progress. Initial emphasis of the R and D programs that will be carried out will be in forming tribologically enhanced materials for industrial applications. In this paper they describe the design and operation of the implanter, summarize the preliminary performance parameters that have been obtained, and outline some of the programs they anticipate doing.

• OSTI ID: 346866
• Report Number(s): CONF-980601-; TRN: IM9920%%83
• Resource Relation: Conference: 25. international conference on plasma science, Raleigh, NC (United States), 1-4 Jun 1998; Other Information: PBD: 1998; Related Information: Is Part Of IEEE conference record -- Abstracts. 1998 IEEE international conference on plasma science; PB: 343 p.
• Country of Publication: United States
• Language: English

Related Subjects

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION
36 MATERIALS SCIENCE
ION SOURCES
ION IMPLANTATION
SURFACE TREATMENTS
BEAM CURRENTS
ION BEAMS
INDUSTRIAL PLANTS
TRIBOLOGY
DESIGN
OPERATION
PERFORMANCE