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Title: Vibration signature analysis of AFM images

Vibration signature analysis has been commonly used for the machine condition monitoring and the control of errors. However, it has been rarely employed for the analysis of the precision instruments such as an atomic force microscope (AFM). In this work, an AFM was used to collect vibration data from a sample positioning stage under different suspension and support conditions. Certain structural characteristics of the sample positioning stage show up as a result of the vibration signature analysis of the surface height images measured using an AFM. It is important to understand these vibration characteristics in order to reduce vibrational uncertainty, improve the damping and structural design, and to eliminate the imaging imperfections. The choice of method applied for vibration analysis may affect the results. Two methods, the data dependent systems (DDS) analysis and the Welch`s periodogram averaging method were investigated for application to this problem. Both techniques provide smooth spectrum plots from the data. Welch`s periodogram provides a coarse resolution as limited by the number of samples and requires a choice of window to be decided subjectively by the user. The DDS analysis provides sharper spectral peaks at a much higher resolution and a much lower noise floor. A decompositionmore » of the signal variance in terms of the frequencies is provided as well. The technique is based on an objective model adequacy criterion.« less
Authors:
;  [1] ;  [2]
  1. National Institute of Standards and Technology, Gaithersburg, MD (United States)
  2. Michigan Technological Univ., Houghton, MI (United States)
Publication Date:
OSTI Identifier:
244175
Report Number(s):
CONF-951056-
TRN: 96:000930-0003
Resource Type:
Book
Resource Relation:
Conference: 10. annual meeting of the American Society for Precision Engineering, Austin, TX (United States), 15-20 Oct 1995; Other Information: PBD: 1995; Related Information: Is Part Of 10th annual meeting of the American Society for Prevision Engineering; PB: 480 p.
Publisher:
American Society for Precision Engineering (ASPE), Raleigh, NC (United States)
Country of Publication:
United States
Language:
English
Subject:
44 INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS; MECHANICAL VIBRATIONS; SPECTRA; DIAGRAMS; EXPERIMENTAL DATA