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Title: X-ray transmissive debris shield

An X-ray debris shield for use in X-ray lithography that is comprised of an X-ray window having a layer of low density foam exhibits increased longevity without a substantial increase in exposure time. The low density foam layer serves to absorb the debris emitted from the X-ray source and attenuate the shock to the window so as to reduce the chance of breakage. Because the foam is low density, the X-rays are hardly attenuated by the foam and thus the exposure time is not substantially increased.
Authors:
Publication Date:
OSTI Identifier:
238067
Report Number(s):
US 5,519,752/A/
PAN: US patent application 8-322,533
DOE Contract Number:
AC04-76DP00789
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 21 May 1996
Research Org:
AT&T Corporation
Country of Publication:
United States
Language:
English
Subject:
32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION; 42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; INTEGRATED CIRCUITS; FABRICATION; EQUIPMENT; SHIELDS; X RADIATION; MASKING; ABSORPTION; ATTENUATION; SHOCK WAVES; MANUFACTURING