Effect of deposition condition and post growth irradiation treatment on the physical properties of diamond-like carbon films

Conference · Sun Dec 31 00:00:00 EST 1995

OSTI ID:230145

Semenovich, V A; Dub, S N ^[1]; Klyui, N I ^[2]

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1. Institute for Superhard Materials, Kiev (Ukraine)
2. Institute for Semicond. Physics, Kiev (Ukraine)

Effect of the RF (13.56 MHz) amplitude (Usa) bias voltage on the physical properties of the films has been examined. Relation between the properties of the films and growth conditions were obtained. Bias voltage and gas composition have a marked influence on the properties of prepared films. Nitrogen implantation of diamond-like carbon (DLC) films improves essentially mechanical properties (increasing of the hardness and Young`s modulus more than two times), which correlates with changes of the optical properties, namely, decreasing of optical band gap and increasing of refractive index of the implanted layer.

• OSTI ID: 230145
• Report Number(s): CONF-950840-; TRN: 96:000433-0145
• Resource Relation: Conference: International conference on applications of diamond films and related materials, Gaithersburg, MD (United States), 21-24 Aug 1995; Other Information: PBD: 1995; Related Information: Is Part Of Applications of diamond films and related materials: Third international conference; Feldman, A.; Yarbrough, W.A.; Murakawa, Masao; Tzeng, Yonhua; Yoshikawa, Masanori [eds.]; PB: 973 p.
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
DIAMONDS
MECHANICAL PROPERTIES
PHYSICAL PROPERTIES
PHYSICAL RADIATION EFFECTS
FILMS
HARDNESS
OPTICAL PROPERTIES
REFRACTIVE INDEX
YOUNG MODULUS
NITROGEN IONS
ION IMPLANTATION