Optical method for distance and displacement measurements of the probe-sample separation in a scanning near-field optical microscope

Journal Article · Fri Apr 15 00:00:00 EDT 2016 · AIP Advances

DOI:https://doi.org/10.1063/1.4947114· OSTI ID:22611641

Santamaria, L.; Siller, H. R. ^[1]; Cortes, R.; Coello, V. ^[2]

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1. Tecnológico de Monterrey, Eugenio Garza Sada 2501 Sur, Monterrey, N.L., 64849 (Mexico)
2. CICESE, Unidad Monterrey, PIIT, Alianza Centro 504, Apodaca, NL, 66629 (Mexico)

In this work, we present an alternative optical method to determine the probe-sample separation distance in a scanning near-field optical microscope. The experimental method is based in a Lloyd’s mirror interferometer and offers a measurement precision deviation of ∼100 nm using digital image processing and numerical analysis. The technique can also be strategically combined with the characterization of piezoelectric actuators and stability evaluation of the optical system. It also opens the possibility for the development of an automatic approximation control system valid for probe-sample distances from 5 to 500 μm.

• OSTI ID: 22611641
• Journal Information: AIP Advances, Vol. 6, Issue 4; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA); ISSN 2158-3226
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ACCURACY
APPROXIMATIONS
CONTROL SYSTEMS
DISTANCE
IMAGE PROCESSING
INTERFEROMETERS
MIRRORS
NUMERICAL ANALYSIS
OPTICAL MICROSCOPES
OPTICAL SYSTEMS
PIEZOELECTRICITY
STABILITY