A new generation of x-ray spectrometry UHV instruments at the SR facilities BESSY II, ELETTRA and SOLEIL

Journal Article · Wed Jul 27 00:00:00 EDT 2016 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.4952834· OSTI ID:22608348

Fliegauf, R.; Holfelder, I.; Hönicke, P.; Müller, M.; Pollakowski, B.; Ulm, G.; Weser, J.; Beckhoff, B. ^[1]; Bogovac, M.; Kaiser, R. B.; Karydas, A. G.; Leani, J. J.; Migliori, A.; Sghaier, H. ^[2]; Boyer, B.; Lépy, M. C.; Ménesguen, Y. ^[3]; Detlefs, B. ^[4]; Eichert, D. ^[5]; others, and

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1. Physikalisch-Technische Bundesanstalt (PTB), Abbestr. 2-12, 10587 Berlin (Germany)
2. Nuclear Science and Instrumentation Laboratory, IAEA Laboratories, A-2444, Seibersdorf (Austria)
3. CEA, LIST, Laboratoire National Henri Becquerel, Bât. 602 PC 111, CEA-Saclay 91191 Gif-sur-Yvette c. (France)
4. CEA-LETI, Minatec Campus, 17 rue des Martyrs, 38054 Grenoble (France)
5. Elettra - Sincrotrone Trieste (EST) S.C.p.A., 34149 Basovizza, Trieste (Italy)

A novel type of ultra-high vacuum instrument for X-ray reflectometry and spectrometry-related techniques for nanoanalytics by means of synchrotron radiation (SR) has been constructed and commissioned at BESSY II. This versa-tile instrument was developed by the PTB, Germany’s national metrology institute, and includes a 9-axis manipulator that allows for an independent alignment of the samples with respect to all degrees of freedom. In addition, it integrates a rotational and translational movement of several photodiodes as well as a translational movement of a beam-geometry-defining aperture system. Thus, the new instrument enables various analytical techniques based on energy dispersive X-ray detectors such as reference-free X-Ray Fluorescence (XRF) analysis, total-reflection XRF, grazing-incidence XRF, in addition to optional X-Ray Reflectometry (XRR) measurements or polarization-dependent X-ray absorption fine structure analyses (XAFS). Samples having a size of up to (100 × 100) mm{sup 2}; can be analyzed with respect to their mass deposition, elemental, spatial or species composition. Surface contamination, nanolayer composition and thickness, depth pro-file of matrix elements or implants, nanoparticles or buried interfaces as well as molecular orientation of bonds can be accessed. Three technology transfer projects of adapted instruments have enhanced X-Ray Spectrometry (XRS) research activities within Europe at the synchrotron radiation facilities ELETTRA (IAEA) and SOLEIL (CEA/LNE-LNHB) as well as at the X-ray innovation laboratory BLiX (TU Berlin) where different laboratory sources are used. Here, smaller chamber requirements led PTB in cooperation with TU Berlin to develop a modified instrument equipped with a 7-axis manipulator: reduced freedom in the choice of experimental geometry modifications (absence of out-of-SR-plane and reference-free XRS options) has been compensated by encoder-enhanced angular accuracy for GIXRF and XRR.

• OSTI ID: 22608348
• Journal Information: AIP Conference Proceedings, Vol. 1741, Issue 1; Conference: SRI2015: 12. international conference on synchrotron radiation instrumentation, New York, NY (United States), 6-10 Jul 2015; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
ABSORPTION
ABSORPTION SPECTROSCOPY
ACCURACY
APERTURES
BESSY STORAGE RING
DEGREES OF FREEDOM
FINE STRUCTURE
FLUORESCENCE
INTERFACES
MASS
PHOTODIODES
POLARIZATION
REFLECTION
SURFACE CONTAMINATION
SYNCHROTRON RADIATION
X RADIATION
X-RAY FLUORESCENCE ANALYSIS
X-RAY SPECTROSCOPY
METROLOGY