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Title: Optical imaging module for astigmatic detection system

In this paper, an optical imaging module design for an astigmatic detection system (ADS) is presented. The module is based on a commercial optical pickup unit (OPU) and it contains a coaxial illuminant for illuminating a specimen. Furthermore, the imaging module facilitates viewing the specimen and the detection laser spot of the ADS with a lateral resolution of approximately 1 μm without requiring the removal of an element of the OPU. Two polarizers and one infrared filter are used to eliminate stray laser light in the OPU and stray light produced by the illuminant. Imaging modules designed for digital versatile disks (DVDs) and Blu-ray DVDs were demonstrated. Furthermore, the module can be used for imaging a small cantilever with approximate dimensions of 2 μm (width) × 5 μm (length), and therefore, it has the potential to be used in high-speed atomic force microscopy.
Authors:
;  [1] ;  [2] ; ;  [3] ; ;  [1] ;  [4]
  1. Institute of Physics, Academia Sinica, Taipei 11529, Taiwan (China)
  2. (China)
  3. Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig (Germany)
  4. Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan (China)
Publication Date:
OSTI Identifier:
22597945
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 87; Journal Issue: 5; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; APPROXIMATIONS; ATOMIC FORCE MICROSCOPY; DESIGN; DETECTION; FILTERS; IMAGES; LASERS; LENGTH; RESOLUTION; VELOCITY