Performance comparison of Rayleigh and STW modes on quartz crystal for strain sensor application
- Nano-IT Fusion Program, Seoul National University of Science and Technology, Seoul 139-743 (Korea, Republic of)
In this study, we compare two kinds of strain sensors based on Rayleigh wave and surface transverse wave (STW) modes, respectively. First, we perform a strain-and-stress analysis using the finite element method, and we consider the contribution to a surface acoustic wave (SAW) velocity shift. Prior to fabrication, we use a coupling-of-modes model to simulate and optimize two-port SAW resonators for both modes. We use a network analyzer to measure and characterize the two devices. Further, we perform an experiment using a strain-testing system with a tapered cross-section cantilever beam. The experimental results show that the ratio of the frequency shift to the strain for the Rayleigh wave mode is −1.124 ppm/με in the parallel direction and 0.109 ppm/με in the perpendicular direction, while the corresponding values for the STW mode are 0.680 ppm/με and 0.189 ppm/με, respectively.
- OSTI ID:
- 22597862
- Journal Information:
- Journal of Applied Physics, Vol. 120, Issue 2; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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