Cr/B{sub 4}C multilayer mirrors: Study of interfaces and X-ray reflectance
- Laboratoire Charles Fabry, Institut d'Optique Graduate School, CNRS, Université Paris-Saclay, 91127 Palaiseau Cedex (France)
- Synchrotron SOLEIL, L'Orme des Merisiers, Saint Aubin, BP 48F-91192 Gif sur Yvette Cedex (France)
- Center for X-ray Optics, Lawrence Berkeley National Laboratory, 1 Cyclotron Rd., Berkeley, California 94720 (United States)
We present an experimental study of the effect of layer interfaces on the x-ray reflectance in Cr/B{sub 4}C multilayer interference coatings with layer thicknesses ranging from 0.7 nm to 5.4 nm. The multilayers were deposited by magnetron sputtering and by ion beam sputtering. Grazing incidence x-ray reflectometry, soft x-ray reflectometry, and transmission electron microscopy reveal asymmetric multilayer structures with a larger B{sub 4}C-on-Cr interface, which we modeled with a 1–1.5 nm thick interfacial layer. Reflectance measurements in the vicinity of the Cr L{sub 2,3} absorption edge demonstrate fine structure that is not predicted by simulations using the currently tabulated refractive index (optical constants) values for Cr.
- OSTI ID:
- 22594532
- Journal Information:
- Journal of Applied Physics, Vol. 119, Issue 12; Other Information: (c) 2016 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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