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Title: Quantitative measurements of shear displacement using atomic force microscopy

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.4944799· OSTI ID:22591477
;  [1]; ;  [2]
  1. Department of Physics and Astronomy, Rutgers University, Piscataway, New Jersey 08854 (United States)
  2. Department of Physics and State Key Laboratory of Low-Dimensional Quantum Physics, Tsinghua University, Beijing 100084 (China)

We report a method to quantitatively measure local shear deformation with high sensitivity using atomic force microscopy. The key point is to simultaneously detect both torsional and buckling motions of atomic force microscopy (AFM) cantilevers induced by the lateral piezoelectric response of the sample. This requires the quantitative calibration of torsional and buckling response of AFM. This method is validated by measuring the angular dependence of the in-plane piezoelectric response of a piece of piezoelectric α-quartz. The accurate determination of the amplitude and orientation of the in-plane piezoelectric response, without rotation, would greatly enhance the efficiency of lateral piezoelectric force microscopy.

OSTI ID:
22591477
Journal Information:
Applied Physics Letters, Vol. 108, Issue 12; Other Information: (c) 2016 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
Country of Publication:
United States
Language:
English