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Title: Highly uniform and reproducible vertical-cavity surface emitting lasers grown by metalorganic chemical vapor deposition

We show that the uniformity of the lasing wavelength of vertical-cavity surface emitting lasers (VCSELs) can be as good as {plus_minus}0.3% across a entire 3 in. wafer in MOCVD growth with a similar run-to-run reproducibility.
Authors:
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Publication Date:
OSTI Identifier:
225047
Report Number(s):
SAND--96-0078C; CONF-960642--1
ON: DE96004703
DOE Contract Number:
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: CLEO/QUELS `96: 16. annual conference on lasers and electro-optics and 6th quantum electronics and laser science conference: shedding new light on universal applications, Anaheim, CA (United States), 2-7 Jun 1996; Other Information: PBD: [1996]
Research Org:
Sandia National Labs., Albuquerque, NM (United States)
Sponsoring Org:
USDOE, Washington, DC (United States)
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; 36 MATERIALS SCIENCE; SEMICONDUCTOR LASERS; FABRICATION; ALUMINIUM ARSENIDES; CHEMICAL VAPOR DEPOSITION; GALLIUM ARSENIDES; CHEMICAL REACTORS; CAVITY RESONATORS