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Title: Interface properties of Si-SiO{sub 2}-Ta{sub 2}O{sub 5} structure by cathodoluminescence spectroscopy

Abstract

We studied formation of the SiO{sub 2}-T{sub 2}O{sub 5} interface in the Si-SiO{sub 2}-Ta{sub 2}O{sub 5} structure using Cathodoluminescence Spectroscopy (CLS). Analyzing the evolution of CLS spectrum of the Si-SiO{sub 2} structure while depositing the Ta{sub 2}O{sub 5} layer allowed to estimate an optical transmittance of the Ta{sub 2}O{sub 5} layer and its band gap. Spectral features related to the formation of the SiO{sub 2}-Ta{sub 2}O{sub 5} interface were identified by comparison of the experimental CL spectrum of the Si-SiO{sub 2}-Ta{sub 2}O{sub 5} structure and its simulated counterpart. This formation involves a decomposition of silanol groups at the outer surface of the SO{sub 2} layer and creation of the Si{sub x}Ta{sub y}O-type layer containing luminescence centers with the emission band centered at 3 eV photon energy.

Authors:
; ; ; ;  [1];  [1]
  1. St. Petersburg State University, St. Petersburg 198504 (Russian Federation)
Publication Date:
OSTI Identifier:
22494988
Resource Type:
Journal Article
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 119; Journal Issue: 5; Other Information: (c) 2016 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0021-8979
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; CATHODOLUMINESCENCE; INTERFACES; LAYERS; SILICON OXIDES; SIMULATION; SPECTROSCOPY; SULFUR DIOXIDE; TANTALUM OXIDES

Citation Formats

Baraban, A. P., Dmitriev, V. A., Drozd, V. E., Prokofiev, V. A., Filatova, E. O., Samarin, S. N., and School of Physics, The University of Western Australia, Perth, Western Australia 6009. Interface properties of Si-SiO{sub 2}-Ta{sub 2}O{sub 5} structure by cathodoluminescence spectroscopy. United States: N. p., 2016. Web. doi:10.1063/1.4941270.
Baraban, A. P., Dmitriev, V. A., Drozd, V. E., Prokofiev, V. A., Filatova, E. O., Samarin, S. N., & School of Physics, The University of Western Australia, Perth, Western Australia 6009. Interface properties of Si-SiO{sub 2}-Ta{sub 2}O{sub 5} structure by cathodoluminescence spectroscopy. United States. https://doi.org/10.1063/1.4941270
Baraban, A. P., Dmitriev, V. A., Drozd, V. E., Prokofiev, V. A., Filatova, E. O., Samarin, S. N., and School of Physics, The University of Western Australia, Perth, Western Australia 6009. 2016. "Interface properties of Si-SiO{sub 2}-Ta{sub 2}O{sub 5} structure by cathodoluminescence spectroscopy". United States. https://doi.org/10.1063/1.4941270.
@article{osti_22494988,
title = {Interface properties of Si-SiO{sub 2}-Ta{sub 2}O{sub 5} structure by cathodoluminescence spectroscopy},
author = {Baraban, A. P. and Dmitriev, V. A. and Drozd, V. E. and Prokofiev, V. A. and Filatova, E. O. and Samarin, S. N. and School of Physics, The University of Western Australia, Perth, Western Australia 6009},
abstractNote = {We studied formation of the SiO{sub 2}-T{sub 2}O{sub 5} interface in the Si-SiO{sub 2}-Ta{sub 2}O{sub 5} structure using Cathodoluminescence Spectroscopy (CLS). Analyzing the evolution of CLS spectrum of the Si-SiO{sub 2} structure while depositing the Ta{sub 2}O{sub 5} layer allowed to estimate an optical transmittance of the Ta{sub 2}O{sub 5} layer and its band gap. Spectral features related to the formation of the SiO{sub 2}-Ta{sub 2}O{sub 5} interface were identified by comparison of the experimental CL spectrum of the Si-SiO{sub 2}-Ta{sub 2}O{sub 5} structure and its simulated counterpart. This formation involves a decomposition of silanol groups at the outer surface of the SO{sub 2} layer and creation of the Si{sub x}Ta{sub y}O-type layer containing luminescence centers with the emission band centered at 3 eV photon energy.},
doi = {10.1063/1.4941270},
url = {https://www.osti.gov/biblio/22494988}, journal = {Journal of Applied Physics},
issn = {0021-8979},
number = 5,
volume = 119,
place = {United States},
year = {Sun Feb 07 00:00:00 EST 2016},
month = {Sun Feb 07 00:00:00 EST 2016}
}