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Title: Excimer laser assisted re-oxidation of BaTiO{sub 3} thin films on Ni metal foils

Excimer laser assisted re-oxidation for reduced, crystallized BaTiO{sub 3} thin films on Ni-foils was investigated. It was found that the BaTiO{sub 3} can be re-oxidized at an oxygen partial pressure of ∼50 mTorr and substrate temperature of 350 °C without forming a NiO{sub x} interface layer between the film and base metal foil. The dielectric permittivity of re-oxidized films was >1000 with loss tangent values <2% at 100 Hz, 30 mV{sub rms} excitation signal. Electron Energy Loss Spectroscopy indicated that BaTiO{sub 3} thin films can be re-oxidized to an oxygen stoichiometry close to ∼3 (e.g., stoichiometric). High resolution cross sectional transmission electron microscopy showed no evidence of NiO{sub x} formation between the BaTiO{sub 3} and the Ni foil upon excimer laser re-oxidation. Spectroscopic ellipsometry studies on laser re-oxidized [001]{sub C} and [111]{sub C} BaTiO{sub 3} single crystals indicate that the re-oxidation of BaTiO{sub 3} single crystals is augmented by photo-excitation of the ozone, as well as laser pulse induced temperature and local stress gradients.
Authors:
; ; ;  [1] ;  [2] ;  [3] ;  [4] ;  [5] ; ;  [1] ;  [5]
  1. Materials Research Institute, The Pennsylvania State University, University Park, Pennsylvania 16802 (United States)
  2. Materials Science and Engineering Department, The Pennsylvania State University, University Park, Pennsylvania 16802 (United States)
  3. Department of Engineering Science and Mechanics, The Pennsylvania State University, University Park, Pennsylvania 16802 (United States)
  4. Department of Physics and Astronomy, University of Toledo, Toledo, Ohio 43606 (United States)
  5. (United States)
Publication Date:
OSTI Identifier:
22494894
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 119; Journal Issue: 2; Other Information: (c) 2016 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ELLIPSOMETRY; ENERGY-LOSS SPECTROSCOPY; EXCIMER LASERS; EXCITATION; FOILS; INTERFACES; LAYERS; MONOCRYSTALS; NICKEL OXIDES; OXIDATION; PARTIAL PRESSURE; PERMITTIVITY; SIGNALS; SUBSTRATES; THIN FILMS; TITANATES; TRANSMISSION ELECTRON MICROSCOPY